JPS5943002B2 - aperture waveguide - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a waveguide suitable for high power transmission and radiation of microwaves for heating plasma or the like using electromagnetic waves, such as microwaves.

When heating plasma etc. using microwaves, high-power microwaves are transmitted through a waveguide and radiated, resulting in uneven temperature distribution in the waveguide due to tube wall loss of the high-power microwaves. The waveguide may be mechanically destroyed.

To prevent this, conventionally the waveguide was cooled by wrapping it around a water-cooled corrugated tube.

However, as the amount of heat removed increases, the temperature of the waveguide wall becomes non-uniform, and the pitch of the corrugated tubes must be determined to avoid this, which significantly impairs manufacturing efficiency.

Furthermore, devices using such water-cooled corrugated tubes have drawbacks such as the inability to arrange the waveguides of an arrayed waveguide formed by arranging a plurality of waveguides close to each other. Ta.

The present invention improves the drawbacks of the conventional devices described above, and aims to provide an aperture waveguide that can perform uniform and efficient cooling or heating and that can arrange a plurality of aperture waveguides in close proximity. shall be.

This invention provides a flow path through which a fluid flows for cooling or heating part or all of the outer peripheral surface of a waveguide, which is provided along the axis of the waveguide and is folded back at the open end. It is configured as follows.

An embodiment of the present invention will be described in detail below.

The aperture waveguide of the present invention is as shown in FIG.
Electromagnetic waves, such as microwaves, incident from the direction of the waveguide propagate inside the inner waveguide tube 2 and are radiated from the entrance of the open end 3 in the direction of the arrow 4, and the electromagnetic energy of the radiated microwaves heats the malasma etc. is configured to do so.

Moreover, a plurality of single waveguide sections 5 (six in FIG. 1) are bundled to form a set of aperture waveguides.

This single portion 5 is a waveguide inner tube 2 through which microwaves propagate.
, a spacer 1 extending in the axial direction on the side wall surface 6 of the inner tube 2, and an outer waveguide surrounding the inner tube 6 so as to form a fluid outgoing path 8 through which fluid flows with the spacer 1. A partition plate 14 that forms a fluid return path 13 through which fluid flows between the tube 9 and a spacer 12 provided on the lower plate 10 of the outer tube 9 and the lower plate 11 of the inner tube 6, and an opening in the partition plate 14. A folded passage 15 provided near the end 3, and an end plate 16 for fluid sealing, which is provided at the open end 3 when this type of waveguide is normally used so that the open end is exposed inside the vacuum container. It is made up of.

In an open waveguide configured in this way, the cooling fluid passes through the outward fluid path and comes into uniform contact with the inner tube surface of the waveguide, so the temperature of the waveguide wall can be made uniform, and the configuration is simple. Therefore, it is easy to manufacture.

Further, with such a structure, it is easy to partially replace the aperture waveguide, and a plurality of aperture waveguides can be arranged closely.

As another embodiment of the present invention, a structure as shown in FIG. 2 may be used.

The open waveguide 17 shown in FIG. 2 has a plurality of inner waveguide tubes 18.
are integrally constructed with their ends aligned with an end plate 19 having an opening.

This end plate 19 is fixedly fixed to the outer tube 20 in a liquid-tight manner.

Further, the waveguide inner tubes 19 are arranged so that the wall surfaces of the inner tubes do not come into contact with each other, and a fluid 21 such as a refrigerant can flow through the gap between the inner tubes as a fluid outgoing path 27.

A partition plate 22 is provided between the upper wall surface of the inner tube 18 and the upper wall surface of the outer tube 20, and the fluid 21 flowing through the wall surface of the inner tube 18 of the waveguide is A folded portion 24 through which the fluid 21 flows is provided between the inner wall portion of the plate 19 and the fluid 21 flows through the folded portion 24 over the upper part of the partition plate 22.

This flow path forms a fluid return path 28.

The open waveguide 17 configured in this manner allows the microwave 25 to enter the waveguide inner tube 18, propagate within the tube, and is radiated from the open end 26.

A fluid such as a refrigerant flows through the outer wall surface of the inner waveguide tube 18 along the tube axis direction, passes through the fluid return path formed by the partition plate 22, and efficiently cools the waveguide 18.

With such a structure, the waveguide inner tubes 18 can be arranged close to each other to the extent that the efficiency of cooling etc. does not decrease, making it possible to cool or heat with a smaller size and uniform temperature, resulting in a simpler structure. This makes it possible to improve manufacturability.

[Brief explanation of drawings]

FIG. 1 is a partially cutaway perspective view showing an embodiment of the present invention, and FIG. 2 is a partially cutaway perspective view showing another embodiment of the present invention. 2.18... Waveguide inner tube, 3,26...
・Opening end, 5... Single part, 7... Spacer, 8, 27... Fluid outward path, 9, 20...
... Waveguide outer tube, 13, 28 ... Fluid return path, 14, 22 ... Partition plate.

Claims (1)

[Claims] 1. In an open waveguide that transmits and radiates electromagnetic waves, an inner waveguide tube through which electromagnetic waves propagate, an outer tube surrounding the outer periphery of the inner waveguide tube, and the inner waveguide tube. A flow path through which fluid can flow along the waveguide axis is provided between the outer tube and the fluid outflow path of this flow path is turned back near the opening end of the open waveguide and communicated with the fluid return path. An aperture waveguide characterized by comprising: 2. The aperture waveguide according to claim 1, wherein the fluid outward path is formed in a gap formed by providing a spacer in the inner waveguide tube and the outer waveguide tube. 3 A plurality of inner waveguide tubes are provided, an outer tube is configured to surround the plurality of inner tubes, and a fluid return path is connected to a partition plate provided between the inner wall of the outer tube and the inner waveguide tube. The aperture waveguide according to claim 1, characterized in that the aperture waveguide is formed between the two ends of the waveguide.