JPS5681159A - Rotary coating apparatus - Google Patents

Rotary coating apparatus

Info

Publication number
JPS5681159A
JPS5681159A JP15891779A JP15891779A JPS5681159A JP S5681159 A JPS5681159 A JP S5681159A JP 15891779 A JP15891779 A JP 15891779A JP 15891779 A JP15891779 A JP 15891779A JP S5681159 A JPS5681159 A JP S5681159A
Authority
JP
Japan
Prior art keywords
rising
rotation numbers
turn table
rotation
imparted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15891779A
Other languages
Japanese (ja)
Other versions
JPS5927230B2 (en
Inventor
Kenichi Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15891779A priority Critical patent/JPS5927230B2/en
Publication of JPS5681159A publication Critical patent/JPS5681159A/en
Publication of JPS5927230B2 publication Critical patent/JPS5927230B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To enhance the quality and the production yield by providing a mechanism for controlling the rising property of rotation numbers when rotation is initiated to eliminate complicated operations in conventional methods corresponding to a kind of a base plate.
CONSTITUTION: The set rotation numbers of the rotary coating apparatus are set a reference rotation numbers and, in order to providing the mechanism for controlling a rising gradient of the rotation numbers to a reference gradient to a shaft part of a turn table 1 to which the base plate to be treated is set, a power generating element 2, a time measuring instrument 3, an A-D converter 4, a digital comparator 5, a reference digital input apparatus 6 and a D-A converter 7 are arranged. By above described constitution, when the rising of the rotation numbers of the turn table 1 is gentle, positive voltage is imparted to a motor for driving the turn table 1 and, when steep, negative voltage is imparted thereto to correct the rising curve thereof to a reference rising curve. This apparatus is effective in forming a photoresist coating on a semiconductor substrate.
COPYRIGHT: (C)1981,JPO&Japio
JP15891779A 1979-12-07 1979-12-07 Rotary coating device Expired JPS5927230B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15891779A JPS5927230B2 (en) 1979-12-07 1979-12-07 Rotary coating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15891779A JPS5927230B2 (en) 1979-12-07 1979-12-07 Rotary coating device

Publications (2)

Publication Number Publication Date
JPS5681159A true JPS5681159A (en) 1981-07-02
JPS5927230B2 JPS5927230B2 (en) 1984-07-04

Family

ID=15682160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15891779A Expired JPS5927230B2 (en) 1979-12-07 1979-12-07 Rotary coating device

Country Status (1)

Country Link
JP (1) JPS5927230B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS599919A (en) * 1982-07-08 1984-01-19 M Setetsuku Kk Applying method for photo-resist
JPS5918633A (en) * 1982-07-22 1984-01-31 Toshiba Corp Resist applying apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS599919A (en) * 1982-07-08 1984-01-19 M Setetsuku Kk Applying method for photo-resist
JPS5918633A (en) * 1982-07-22 1984-01-31 Toshiba Corp Resist applying apparatus

Also Published As

Publication number Publication date
JPS5927230B2 (en) 1984-07-04

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