JPS5680191A - Gas laser device - Google Patents

Gas laser device

Info

Publication number
JPS5680191A
JPS5680191A JP15783379A JP15783379A JPS5680191A JP S5680191 A JPS5680191 A JP S5680191A JP 15783379 A JP15783379 A JP 15783379A JP 15783379 A JP15783379 A JP 15783379A JP S5680191 A JPS5680191 A JP S5680191A
Authority
JP
Japan
Prior art keywords
discharge tube
electrodes
discharge
pair
power source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15783379A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0225268B2 (en, 2012
Inventor
Norikazu Tabata
Shigenori Yagi
Shuji Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP15783379A priority Critical patent/JPS5680191A/ja
Publication of JPS5680191A publication Critical patent/JPS5680191A/ja
Publication of JPH0225268B2 publication Critical patent/JPH0225268B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
JP15783379A 1979-12-05 1979-12-05 Gas laser device Granted JPS5680191A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15783379A JPS5680191A (en) 1979-12-05 1979-12-05 Gas laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15783379A JPS5680191A (en) 1979-12-05 1979-12-05 Gas laser device

Publications (2)

Publication Number Publication Date
JPS5680191A true JPS5680191A (en) 1981-07-01
JPH0225268B2 JPH0225268B2 (en, 2012) 1990-06-01

Family

ID=15658319

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15783379A Granted JPS5680191A (en) 1979-12-05 1979-12-05 Gas laser device

Country Status (1)

Country Link
JP (1) JPS5680191A (en, 2012)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60178686A (ja) * 1984-02-24 1985-09-12 Mitsubishi Electric Corp ガスレ−ザ装置
WO2024184021A1 (en) * 2023-03-03 2024-09-12 Asml Netherlands B.V. Improved gas laser

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5097289A (en, 2012) * 1973-12-26 1975-08-02
JPS54154988A (en) * 1978-05-29 1979-12-06 Mitsubishi Electric Corp Silent discharge type gas laser device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5097289A (en, 2012) * 1973-12-26 1975-08-02
JPS54154988A (en) * 1978-05-29 1979-12-06 Mitsubishi Electric Corp Silent discharge type gas laser device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60178686A (ja) * 1984-02-24 1985-09-12 Mitsubishi Electric Corp ガスレ−ザ装置
WO2024184021A1 (en) * 2023-03-03 2024-09-12 Asml Netherlands B.V. Improved gas laser

Also Published As

Publication number Publication date
JPH0225268B2 (en, 2012) 1990-06-01

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