JPS5662332A - Mark printer - Google Patents

Mark printer

Info

Publication number
JPS5662332A
JPS5662332A JP13848179A JP13848179A JPS5662332A JP S5662332 A JPS5662332 A JP S5662332A JP 13848179 A JP13848179 A JP 13848179A JP 13848179 A JP13848179 A JP 13848179A JP S5662332 A JPS5662332 A JP S5662332A
Authority
JP
Japan
Prior art keywords
chip
mark
arm
causing
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13848179A
Other languages
Japanese (ja)
Inventor
Kazuyuki Takano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13848179A priority Critical patent/JPS5662332A/en
Publication of JPS5662332A publication Critical patent/JPS5662332A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Abstract

PURPOSE:To print a mark on a chip determined to be defective accurately and without causing damage by means of a mark printing pen having a member impregnated with a printing material and a felt tip mounted oscillably. CONSTITUTION:For example, when a chip 13 is determined to be defective in a wafer 12 on a wafer table 11, receiving an indication single from a wafer checking device, a pair of attracting magnets 20 and 20 are excited to attract an arm 14 until an open end thereof lowers (arrow A). Then, a pen tip 25 projecting from a pen body 23 mounted on an arm 14a presses against the chip 13 causing a rejection mark comprising ink to be printed thereon. At this point, the lowering level of the arm 14a and pressure working on the chip being printed can be set as desired with a stroke controlling screw 22. This enables the printing of the rejection mark without causing any mechanical damage to the chip.
JP13848179A 1979-10-26 1979-10-26 Mark printer Pending JPS5662332A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13848179A JPS5662332A (en) 1979-10-26 1979-10-26 Mark printer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13848179A JPS5662332A (en) 1979-10-26 1979-10-26 Mark printer

Publications (1)

Publication Number Publication Date
JPS5662332A true JPS5662332A (en) 1981-05-28

Family

ID=15223076

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13848179A Pending JPS5662332A (en) 1979-10-26 1979-10-26 Mark printer

Country Status (1)

Country Link
JP (1) JPS5662332A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01112744A (en) * 1987-10-27 1989-05-01 Tokyo Electron Ltd Wafer prober
CN106067061A (en) * 2016-06-28 2016-11-02 东莞市锐祥智能卡科技有限公司 One is full-automatic to be counted chip machine and automatically counts chip method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5123858A (en) * 1974-08-21 1976-02-26 Kubota Ltd

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5123858A (en) * 1974-08-21 1976-02-26 Kubota Ltd

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01112744A (en) * 1987-10-27 1989-05-01 Tokyo Electron Ltd Wafer prober
CN106067061A (en) * 2016-06-28 2016-11-02 东莞市锐祥智能卡科技有限公司 One is full-automatic to be counted chip machine and automatically counts chip method
CN106067061B (en) * 2016-06-28 2018-11-27 东莞市锐祥智能卡科技有限公司 A kind of full-automatic several chip machines and automatically count chip methods

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