JPS54134568A - Wafer mapping unit - Google Patents
Wafer mapping unitInfo
- Publication number
- JPS54134568A JPS54134568A JP4245978A JP4245978A JPS54134568A JP S54134568 A JPS54134568 A JP S54134568A JP 4245978 A JP4245978 A JP 4245978A JP 4245978 A JP4245978 A JP 4245978A JP S54134568 A JPS54134568 A JP S54134568A
- Authority
- JP
- Japan
- Prior art keywords
- inker
- recording paper
- mapping unit
- measuring unit
- wafer mapping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To make a wafer mapping unit small-space by providing a recording paper putting-on stand, which moves synchronously with the X-Y stage of a measuring unit, and an inker for recording paper which moves synchronously with the inker of the measuring unit.
CONSTITUTION: Arm 2 is fitted to X-Y stage 1 of a wafer measuring unit (prober), and recording paper putting-on stand 3 is provided at the tip. Then, inker 5 which dots on recording paper 4 with ink is fixed by arm 6. Inker 5 of a mapping unit is connected in series to inker 7 of the prober.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4245978A JPS54134568A (en) | 1978-04-10 | 1978-04-10 | Wafer mapping unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4245978A JPS54134568A (en) | 1978-04-10 | 1978-04-10 | Wafer mapping unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54134568A true JPS54134568A (en) | 1979-10-19 |
Family
ID=12636647
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4245978A Pending JPS54134568A (en) | 1978-04-10 | 1978-04-10 | Wafer mapping unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54134568A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01214133A (en) * | 1988-02-23 | 1989-08-28 | Nec Corp | Marking of semiconductor wafer |
CN102637616A (en) * | 2012-04-24 | 2012-08-15 | 上海宏力半导体制造有限公司 | Wafer detection device and wafer detection method |
-
1978
- 1978-04-10 JP JP4245978A patent/JPS54134568A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01214133A (en) * | 1988-02-23 | 1989-08-28 | Nec Corp | Marking of semiconductor wafer |
CN102637616A (en) * | 2012-04-24 | 2012-08-15 | 上海宏力半导体制造有限公司 | Wafer detection device and wafer detection method |
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