JPS54134568A - Wafer mapping unit - Google Patents

Wafer mapping unit

Info

Publication number
JPS54134568A
JPS54134568A JP4245978A JP4245978A JPS54134568A JP S54134568 A JPS54134568 A JP S54134568A JP 4245978 A JP4245978 A JP 4245978A JP 4245978 A JP4245978 A JP 4245978A JP S54134568 A JPS54134568 A JP S54134568A
Authority
JP
Japan
Prior art keywords
inker
recording paper
mapping unit
measuring unit
wafer mapping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4245978A
Other languages
Japanese (ja)
Inventor
Osamu Yamaji
Kiyoshi Nakamura
Hisashi Funakoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP4245978A priority Critical patent/JPS54134568A/en
Publication of JPS54134568A publication Critical patent/JPS54134568A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make a wafer mapping unit small-space by providing a recording paper putting-on stand, which moves synchronously with the X-Y stage of a measuring unit, and an inker for recording paper which moves synchronously with the inker of the measuring unit.
CONSTITUTION: Arm 2 is fitted to X-Y stage 1 of a wafer measuring unit (prober), and recording paper putting-on stand 3 is provided at the tip. Then, inker 5 which dots on recording paper 4 with ink is fixed by arm 6. Inker 5 of a mapping unit is connected in series to inker 7 of the prober.
COPYRIGHT: (C)1979,JPO&Japio
JP4245978A 1978-04-10 1978-04-10 Wafer mapping unit Pending JPS54134568A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4245978A JPS54134568A (en) 1978-04-10 1978-04-10 Wafer mapping unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4245978A JPS54134568A (en) 1978-04-10 1978-04-10 Wafer mapping unit

Publications (1)

Publication Number Publication Date
JPS54134568A true JPS54134568A (en) 1979-10-19

Family

ID=12636647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4245978A Pending JPS54134568A (en) 1978-04-10 1978-04-10 Wafer mapping unit

Country Status (1)

Country Link
JP (1) JPS54134568A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01214133A (en) * 1988-02-23 1989-08-28 Nec Corp Marking of semiconductor wafer
CN102637616A (en) * 2012-04-24 2012-08-15 上海宏力半导体制造有限公司 Wafer detection device and wafer detection method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01214133A (en) * 1988-02-23 1989-08-28 Nec Corp Marking of semiconductor wafer
CN102637616A (en) * 2012-04-24 2012-08-15 上海宏力半导体制造有限公司 Wafer detection device and wafer detection method

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