JPS5662329A - Conveying direction turning device for semiconductor wafer - Google Patents
Conveying direction turning device for semiconductor waferInfo
- Publication number
- JPS5662329A JPS5662329A JP13781579A JP13781579A JPS5662329A JP S5662329 A JPS5662329 A JP S5662329A JP 13781579 A JP13781579 A JP 13781579A JP 13781579 A JP13781579 A JP 13781579A JP S5662329 A JPS5662329 A JP S5662329A
- Authority
- JP
- Japan
- Prior art keywords
- section
- semiconductor wafer
- conveying
- turned
- conveying direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 4
- LYKJEJVAXSGWAJ-UHFFFAOYSA-N compactone Natural products CC1(C)CCCC2(C)C1CC(=O)C3(O)CC(C)(CCC23)C=C LYKJEJVAXSGWAJ-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Feeding Of Articles To Conveyors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13781579A JPS5662329A (en) | 1979-10-26 | 1979-10-26 | Conveying direction turning device for semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13781579A JPS5662329A (en) | 1979-10-26 | 1979-10-26 | Conveying direction turning device for semiconductor wafer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5662329A true JPS5662329A (en) | 1981-05-28 |
JPS6318325B2 JPS6318325B2 (ja) | 1988-04-18 |
Family
ID=15207496
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13781579A Granted JPS5662329A (en) | 1979-10-26 | 1979-10-26 | Conveying direction turning device for semiconductor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5662329A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6376722U (ja) * | 1986-11-04 | 1988-05-21 | ||
JP2008149491A (ja) * | 2006-12-14 | 2008-07-03 | Seiken Graphics Kk | 刷版加工装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50126175A (ja) * | 1974-03-22 | 1975-10-03 |
-
1979
- 1979-10-26 JP JP13781579A patent/JPS5662329A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50126175A (ja) * | 1974-03-22 | 1975-10-03 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6376722U (ja) * | 1986-11-04 | 1988-05-21 | ||
JPH0527373Y2 (ja) * | 1986-11-04 | 1993-07-13 | ||
JP2008149491A (ja) * | 2006-12-14 | 2008-07-03 | Seiken Graphics Kk | 刷版加工装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS6318325B2 (ja) | 1988-04-18 |
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