JPS5659424A - Manufacture of cathode supporting parts - Google Patents

Manufacture of cathode supporting parts

Info

Publication number
JPS5659424A
JPS5659424A JP13517879A JP13517879A JPS5659424A JP S5659424 A JPS5659424 A JP S5659424A JP 13517879 A JP13517879 A JP 13517879A JP 13517879 A JP13517879 A JP 13517879A JP S5659424 A JPS5659424 A JP S5659424A
Authority
JP
Japan
Prior art keywords
adhered
reaction chamber
carbon
supporting parts
parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13517879A
Other languages
Japanese (ja)
Other versions
JPS6321289B2 (en
Inventor
Kazuo Shirohashi
Rokuro Tsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13517879A priority Critical patent/JPS5659424A/en
Publication of JPS5659424A publication Critical patent/JPS5659424A/en
Publication of JPS6321289B2 publication Critical patent/JPS6321289B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)

Abstract

PURPOSE:To eliminate the carbon lump adhered on a glass substrate without influence on other parts and to improve the characteristic of an electron tube, by processing a sintered cathode supporting parts in activated oxygen atmosphere. CONSTITUTION:Cathode supporting parts 4 having carbon lumps 9 adhered to a glass substrate 5 are arranged on a processing board 10 and placed in an oxygen plasma reaction chamber 11 then it is evacuated. Thereafter oxygen gas is injected to regulate the degree of vacuum and a device 12 will discharge high frequency output from an electrode 13 to the reaction chamber 11. Consequently the oxygen in the reaction chamber 11 is activated by the high frequency and reacts with the adhered carbon lumps 9 then exhausted as CO or CO2 through the reaction chamber 11. Consequently the carbon adhered on the substrate can be removed completely resulting in a parts having excellent characteristics.
JP13517879A 1979-10-22 1979-10-22 Manufacture of cathode supporting parts Granted JPS5659424A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13517879A JPS5659424A (en) 1979-10-22 1979-10-22 Manufacture of cathode supporting parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13517879A JPS5659424A (en) 1979-10-22 1979-10-22 Manufacture of cathode supporting parts

Publications (2)

Publication Number Publication Date
JPS5659424A true JPS5659424A (en) 1981-05-22
JPS6321289B2 JPS6321289B2 (en) 1988-05-06

Family

ID=15145650

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13517879A Granted JPS5659424A (en) 1979-10-22 1979-10-22 Manufacture of cathode supporting parts

Country Status (1)

Country Link
JP (1) JPS5659424A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5828155A (en) * 1981-08-12 1983-02-19 Hitachi Ltd Manufacture of hermetic member used for supporting electron-gun cathode
JPH02223126A (en) * 1990-01-26 1990-09-05 Hitachi Ltd Manufacture of cathode holding hermetic component for electron gun

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5828155A (en) * 1981-08-12 1983-02-19 Hitachi Ltd Manufacture of hermetic member used for supporting electron-gun cathode
JPH0437532B2 (en) * 1981-08-12 1992-06-19 Hitachi Ltd
JPH02223126A (en) * 1990-01-26 1990-09-05 Hitachi Ltd Manufacture of cathode holding hermetic component for electron gun
JPH0371732B2 (en) * 1990-01-26 1991-11-14 Hitachi Ltd

Also Published As

Publication number Publication date
JPS6321289B2 (en) 1988-05-06

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