JPS565521A - Light scanning disc and its manufacture - Google Patents

Light scanning disc and its manufacture

Info

Publication number
JPS565521A
JPS565521A JP8117179A JP8117179A JPS565521A JP S565521 A JPS565521 A JP S565521A JP 8117179 A JP8117179 A JP 8117179A JP 8117179 A JP8117179 A JP 8117179A JP S565521 A JPS565521 A JP S565521A
Authority
JP
Japan
Prior art keywords
light
blazed
mask
grating
photosensitive material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8117179A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6321171B2 (enrdf_load_stackoverflow
Inventor
Keiichi Kubota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP8117179A priority Critical patent/JPS565521A/ja
Publication of JPS565521A publication Critical patent/JPS565521A/ja
Publication of JPS6321171B2 publication Critical patent/JPS6321171B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP8117179A 1979-06-27 1979-06-27 Light scanning disc and its manufacture Granted JPS565521A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8117179A JPS565521A (en) 1979-06-27 1979-06-27 Light scanning disc and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8117179A JPS565521A (en) 1979-06-27 1979-06-27 Light scanning disc and its manufacture

Publications (2)

Publication Number Publication Date
JPS565521A true JPS565521A (en) 1981-01-21
JPS6321171B2 JPS6321171B2 (enrdf_load_stackoverflow) 1988-05-06

Family

ID=13739002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8117179A Granted JPS565521A (en) 1979-06-27 1979-06-27 Light scanning disc and its manufacture

Country Status (1)

Country Link
JP (1) JPS565521A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH038044U (enrdf_load_stackoverflow) * 1989-06-12 1991-01-25

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5313403A (en) * 1976-07-22 1978-02-07 Nec Corp Optical disc for scanning

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5313403A (en) * 1976-07-22 1978-02-07 Nec Corp Optical disc for scanning

Also Published As

Publication number Publication date
JPS6321171B2 (enrdf_load_stackoverflow) 1988-05-06

Similar Documents

Publication Publication Date Title
US5061025A (en) Hologon scanner with beam shaping stationary diffraction grating
JPS5590931A (en) Production of micro structure element array
JPS6455502A (en) Solid phase reflective diffraction grating and hologram
US4940308A (en) Laser beam stop
Koronkevich et al. Fabrication of diffractive optical elements by direct laser-writing with circular scanning
JPS565521A (en) Light scanning disc and its manufacture
JPH10233361A (ja) 露光方法と露光用マスク
CA1308282C (en) Hologon and method of manufacturing a hologon
US4840443A (en) Holographic scanner spinner
JPS5581382A (en) Production of optical reading hologram
JPS5617017A (en) Positioning device using bidirectional diffraction grating
JPS63187202A (ja) ブレ−ズドホログラフイツク回折格子
JPH06264272A (ja) 微細加工法
JPH0774085A (ja) 投影露光装置の照明系
JPS6310402B2 (enrdf_load_stackoverflow)
JPH0456284B2 (enrdf_load_stackoverflow)
JPS6025761B2 (ja) ホログラフイック・グレ−ティングの製造方法
RU1099747C (ru) Устройство для записи радиальной дифракционной решетки
JPH07101302B2 (ja) 回折格子の作製方法及びそれに用いるオートマスク
JP2000162418A (ja) 光学部品及びその加工方法
JPS55157717A (en) Light beam scanner
KR980010631A (ko) 사입사조명을 위한 투영노광장치
JPS55157714A (en) Light scanner
JPS5545075A (en) Hologram lens
JPS6332361B2 (enrdf_load_stackoverflow)