JPS5653852B2 - - Google Patents

Info

Publication number
JPS5653852B2
JPS5653852B2 JP15179178A JP15179178A JPS5653852B2 JP S5653852 B2 JPS5653852 B2 JP S5653852B2 JP 15179178 A JP15179178 A JP 15179178A JP 15179178 A JP15179178 A JP 15179178A JP S5653852 B2 JPS5653852 B2 JP S5653852B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15179178A
Other versions
JPS5588335A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15179178A priority Critical patent/JPS5588335A/ja
Publication of JPS5588335A publication Critical patent/JPS5588335A/ja
Publication of JPS5653852B2 publication Critical patent/JPS5653852B2/ja
Granted legal-status Critical Current

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  • Drying Of Semiconductors (AREA)
JP15179178A 1978-12-07 1978-12-07 Automatic conveying mechanism for plasma etching/ stripping device Granted JPS5588335A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15179178A JPS5588335A (en) 1978-12-07 1978-12-07 Automatic conveying mechanism for plasma etching/ stripping device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15179178A JPS5588335A (en) 1978-12-07 1978-12-07 Automatic conveying mechanism for plasma etching/ stripping device

Publications (2)

Publication Number Publication Date
JPS5588335A JPS5588335A (en) 1980-07-04
JPS5653852B2 true JPS5653852B2 (ja) 1981-12-22

Family

ID=15526363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15179178A Granted JPS5588335A (en) 1978-12-07 1978-12-07 Automatic conveying mechanism for plasma etching/ stripping device

Country Status (1)

Country Link
JP (1) JPS5588335A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5873661U (ja) * 1981-11-13 1983-05-18 クラリオン株式会社 インタ−ホン
JPS5967063U (ja) * 1982-10-26 1984-05-07 シャープ株式会社 インタ−ホン
JPS635752U (ja) * 1986-06-26 1988-01-14
JPS6331148B2 (ja) * 1980-03-07 1988-06-22 Hitachi Ltd

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5766641A (en) * 1980-10-09 1982-04-22 Mitsubishi Electric Corp Plasma etching
US4341582A (en) * 1980-12-22 1982-07-27 The Perkin-Elmer Corporation Load-lock vacuum chamber
JPS5966121A (ja) * 1982-10-08 1984-04-14 Hitachi Ltd 反応室の大気開放方法
JPS6039240U (ja) * 1983-08-24 1985-03-19 ウシオ電機株式会社 紫外線洗浄装置
JPS61271836A (ja) * 1985-05-28 1986-12-02 Ulvac Corp ドライエツチング装置
JPH0332U (ja) * 1990-05-25 1991-01-07

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5617952Y2 (ja) * 1975-02-24 1981-04-27

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6331148B2 (ja) * 1980-03-07 1988-06-22 Hitachi Ltd
JPS5873661U (ja) * 1981-11-13 1983-05-18 クラリオン株式会社 インタ−ホン
JPS5967063U (ja) * 1982-10-26 1984-05-07 シャープ株式会社 インタ−ホン
JPS635752U (ja) * 1986-06-26 1988-01-14

Also Published As

Publication number Publication date
JPS5588335A (en) 1980-07-04

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