JPS5635781A - Preventing method for oxidation of heat-treated copper film - Google Patents
Preventing method for oxidation of heat-treated copper filmInfo
- Publication number
- JPS5635781A JPS5635781A JP11078179A JP11078179A JPS5635781A JP S5635781 A JPS5635781 A JP S5635781A JP 11078179 A JP11078179 A JP 11078179A JP 11078179 A JP11078179 A JP 11078179A JP S5635781 A JPS5635781 A JP S5635781A
- Authority
- JP
- Japan
- Prior art keywords
- copper film
- oxidation
- heat
- trichlene
- soln
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Heat Treatment Of Nonferrous Metals Or Alloys (AREA)
- Preventing Corrosion Or Incrustation Of Metals (AREA)
- Electrodes Of Semiconductors (AREA)
- Ceramic Capacitors (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
PURPOSE: To increase the reliability of electric parts etc., by the heat treatment of the surface of ceramic blank on which copper film has been formed, then by contacting the surface with a soln. of halogenated hydrocarbon compound such as trichlene in which a surface active agent is dissolved thereby preventing the oxidation of the copper film.
CONSTITUTION: A copper film is formed on the surface of a ceramic blank such as dielectric, insulator, resistor, semiconductor, or electrode for fetching capacity by any one method among electroless plating, vacuum deposition, sputtering, ion plating, and is heat-treated in an inert atmosphere at a prescribed temp. Then the surface is allowed to contact with a soln. of halogenated hydrocarbon compound such as trichlene, perchlene, freon etc. contg. surfactant e.g. anionic surface active agent. Hereby the surface of the copper film is prevented from oxidation, hence it is preserved for a long time, and its soldering property is also improved.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54110781A JPS5946311B2 (en) | 1979-08-29 | 1979-08-29 | Method for preventing oxidation of heat-treated copper coatings |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54110781A JPS5946311B2 (en) | 1979-08-29 | 1979-08-29 | Method for preventing oxidation of heat-treated copper coatings |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5635781A true JPS5635781A (en) | 1981-04-08 |
JPS5946311B2 JPS5946311B2 (en) | 1984-11-12 |
Family
ID=14544444
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP54110781A Expired JPS5946311B2 (en) | 1979-08-29 | 1979-08-29 | Method for preventing oxidation of heat-treated copper coatings |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5946311B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01312742A (en) * | 1988-06-13 | 1989-12-18 | Olympus Optical Co Ltd | Actuator for optical pickup |
US5671903A (en) * | 1993-12-29 | 1997-09-30 | Tokyo Electron Tohoku Kabushiki Kaisha | Heat treatment apparatus and valve device for use in the same |
-
1979
- 1979-08-29 JP JP54110781A patent/JPS5946311B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01312742A (en) * | 1988-06-13 | 1989-12-18 | Olympus Optical Co Ltd | Actuator for optical pickup |
US5671903A (en) * | 1993-12-29 | 1997-09-30 | Tokyo Electron Tohoku Kabushiki Kaisha | Heat treatment apparatus and valve device for use in the same |
Also Published As
Publication number | Publication date |
---|---|
JPS5946311B2 (en) | 1984-11-12 |
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