JPS5635781A - Preventing method for oxidation of heat-treated copper film - Google Patents

Preventing method for oxidation of heat-treated copper film

Info

Publication number
JPS5635781A
JPS5635781A JP11078179A JP11078179A JPS5635781A JP S5635781 A JPS5635781 A JP S5635781A JP 11078179 A JP11078179 A JP 11078179A JP 11078179 A JP11078179 A JP 11078179A JP S5635781 A JPS5635781 A JP S5635781A
Authority
JP
Japan
Prior art keywords
copper film
oxidation
heat
trichlene
soln
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11078179A
Other languages
Japanese (ja)
Other versions
JPS5946311B2 (en
Inventor
Atsuo Senda
Toru Kasatsugu
Takuji Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP54110781A priority Critical patent/JPS5946311B2/en
Publication of JPS5635781A publication Critical patent/JPS5635781A/en
Publication of JPS5946311B2 publication Critical patent/JPS5946311B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Heat Treatment Of Nonferrous Metals Or Alloys (AREA)
  • Preventing Corrosion Or Incrustation Of Metals (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Ceramic Capacitors (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

PURPOSE: To increase the reliability of electric parts etc., by the heat treatment of the surface of ceramic blank on which copper film has been formed, then by contacting the surface with a soln. of halogenated hydrocarbon compound such as trichlene in which a surface active agent is dissolved thereby preventing the oxidation of the copper film.
CONSTITUTION: A copper film is formed on the surface of a ceramic blank such as dielectric, insulator, resistor, semiconductor, or electrode for fetching capacity by any one method among electroless plating, vacuum deposition, sputtering, ion plating, and is heat-treated in an inert atmosphere at a prescribed temp. Then the surface is allowed to contact with a soln. of halogenated hydrocarbon compound such as trichlene, perchlene, freon etc. contg. surfactant e.g. anionic surface active agent. Hereby the surface of the copper film is prevented from oxidation, hence it is preserved for a long time, and its soldering property is also improved.
COPYRIGHT: (C)1981,JPO&Japio
JP54110781A 1979-08-29 1979-08-29 Method for preventing oxidation of heat-treated copper coatings Expired JPS5946311B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54110781A JPS5946311B2 (en) 1979-08-29 1979-08-29 Method for preventing oxidation of heat-treated copper coatings

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54110781A JPS5946311B2 (en) 1979-08-29 1979-08-29 Method for preventing oxidation of heat-treated copper coatings

Publications (2)

Publication Number Publication Date
JPS5635781A true JPS5635781A (en) 1981-04-08
JPS5946311B2 JPS5946311B2 (en) 1984-11-12

Family

ID=14544444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54110781A Expired JPS5946311B2 (en) 1979-08-29 1979-08-29 Method for preventing oxidation of heat-treated copper coatings

Country Status (1)

Country Link
JP (1) JPS5946311B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01312742A (en) * 1988-06-13 1989-12-18 Olympus Optical Co Ltd Actuator for optical pickup
US5671903A (en) * 1993-12-29 1997-09-30 Tokyo Electron Tohoku Kabushiki Kaisha Heat treatment apparatus and valve device for use in the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01312742A (en) * 1988-06-13 1989-12-18 Olympus Optical Co Ltd Actuator for optical pickup
US5671903A (en) * 1993-12-29 1997-09-30 Tokyo Electron Tohoku Kabushiki Kaisha Heat treatment apparatus and valve device for use in the same

Also Published As

Publication number Publication date
JPS5946311B2 (en) 1984-11-12

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