JPS5635360A - Sample tilting device for electron microscope or the like - Google Patents

Sample tilting device for electron microscope or the like

Info

Publication number
JPS5635360A
JPS5635360A JP11159979A JP11159979A JPS5635360A JP S5635360 A JPS5635360 A JP S5635360A JP 11159979 A JP11159979 A JP 11159979A JP 11159979 A JP11159979 A JP 11159979A JP S5635360 A JPS5635360 A JP S5635360A
Authority
JP
Japan
Prior art keywords
sample
holding bar
lever body
sample holding
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11159979A
Other languages
Japanese (ja)
Other versions
JPS5948509B2 (en
Inventor
Shigeru Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INTERNATL PRECISION Inc
KOKUSAI SEIKO
Original Assignee
INTERNATL PRECISION Inc
KOKUSAI SEIKO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INTERNATL PRECISION Inc, KOKUSAI SEIKO filed Critical INTERNATL PRECISION Inc
Priority to JP54111599A priority Critical patent/JPS5948509B2/en
Publication of JPS5635360A publication Critical patent/JPS5635360A/en
Publication of JPS5948509B2 publication Critical patent/JPS5948509B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To hold a less distance between the position of a sample and the side of a lever body in a device, by interposing a spherical cone between the end of a sample holding bar and the side of the lever body provided in the vicinity of the end of said holding bar and moving the holding bar in the direction of an X-axis. CONSTITUTION:A turning motion of an X-control screw 6 causes a lever body 19 to make a turning motion about a support point, and a side 32 of the lever body is moved far and near toward the direction of an end of a sample holding bar 4. In relation to a movement of the lever body 19 a bottom face 25 of a spherical cone 20 makes a rolling motion on the side 32, and a vertex 24 of the cone 20 moves in the direction of an X-axis while pressing the central end part of the sample holding bar 4 by a distance of movement of the side 32 is the direction of the end of the sample holding bar 4 to shift the sample holding bar 4 in the direction of the X-axis toward a press-out direction. Though a drift of the sample is caused by the action of thermal expansion and contraction in each elemental part that constitutes a sample device, a displacement of the sample can be decreased by forming the spherical cone 20 into small size.
JP54111599A 1979-08-31 1979-08-31 Sample tilting device such as electron microscope Expired JPS5948509B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54111599A JPS5948509B2 (en) 1979-08-31 1979-08-31 Sample tilting device such as electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54111599A JPS5948509B2 (en) 1979-08-31 1979-08-31 Sample tilting device such as electron microscope

Publications (2)

Publication Number Publication Date
JPS5635360A true JPS5635360A (en) 1981-04-08
JPS5948509B2 JPS5948509B2 (en) 1984-11-27

Family

ID=14565431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54111599A Expired JPS5948509B2 (en) 1979-08-31 1979-08-31 Sample tilting device such as electron microscope

Country Status (1)

Country Link
JP (1) JPS5948509B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57136163U (en) * 1981-02-20 1982-08-25
JPS59221954A (en) * 1983-05-31 1984-12-13 Internatl Precision Inc Specimen moving unit for electron beam system
JPS6054151A (en) * 1983-09-02 1985-03-28 Internatl Precision Inc Sample-moving device for electron ray device
JPS60105151A (en) * 1983-11-10 1985-06-10 Internatl Precision Inc Sample transfer device for electron ray equipment
JPS60232654A (en) * 1984-04-28 1985-11-19 Hitachi Ltd Specimen table in scanning electron microscope

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS624712U (en) * 1985-06-26 1987-01-12
JPS6373710U (en) * 1986-10-31 1988-05-17

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57136163U (en) * 1981-02-20 1982-08-25
JPS6244454Y2 (en) * 1981-02-20 1987-11-24
JPS59221954A (en) * 1983-05-31 1984-12-13 Internatl Precision Inc Specimen moving unit for electron beam system
JPS6054151A (en) * 1983-09-02 1985-03-28 Internatl Precision Inc Sample-moving device for electron ray device
JPS60105151A (en) * 1983-11-10 1985-06-10 Internatl Precision Inc Sample transfer device for electron ray equipment
JPS60232654A (en) * 1984-04-28 1985-11-19 Hitachi Ltd Specimen table in scanning electron microscope
JPH057818B2 (en) * 1984-04-28 1993-01-29 Hitachi Seisakusho Kk

Also Published As

Publication number Publication date
JPS5948509B2 (en) 1984-11-27

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