JPS5263679A - Sample moving device - Google Patents
Sample moving deviceInfo
- Publication number
- JPS5263679A JPS5263679A JP13876875A JP13876875A JPS5263679A JP S5263679 A JPS5263679 A JP S5263679A JP 13876875 A JP13876875 A JP 13876875A JP 13876875 A JP13876875 A JP 13876875A JP S5263679 A JPS5263679 A JP S5263679A
- Authority
- JP
- Japan
- Prior art keywords
- moving device
- sample moving
- base material
- side face
- form groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To enable highly accurate movement by composing the device with a base material having a C-form groove whose one side face is flattened and a base material fitting into the C-form groove whose other side face is flat and moving the base materials on a face contact state.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13876875A JPS5263679A (en) | 1975-11-20 | 1975-11-20 | Sample moving device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13876875A JPS5263679A (en) | 1975-11-20 | 1975-11-20 | Sample moving device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5263679A true JPS5263679A (en) | 1977-05-26 |
Family
ID=15229731
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13876875A Pending JPS5263679A (en) | 1975-11-20 | 1975-11-20 | Sample moving device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5263679A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57113120A (en) * | 1980-12-30 | 1982-07-14 | Fujitsu Ltd | Positioning control system |
JPH02180014A (en) * | 1988-12-29 | 1990-07-12 | Fujitsu Ltd | Table guide device, moveable table, and electron beam exposure device |
-
1975
- 1975-11-20 JP JP13876875A patent/JPS5263679A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57113120A (en) * | 1980-12-30 | 1982-07-14 | Fujitsu Ltd | Positioning control system |
JPH02180014A (en) * | 1988-12-29 | 1990-07-12 | Fujitsu Ltd | Table guide device, moveable table, and electron beam exposure device |
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