JPS59221954A - Specimen moving unit for electron beam system - Google Patents

Abstract

PURPOSE:To move the specimen accurately and to obtain a unit having excellent vibration withstandability by employing a rolling member for the coupling member to be placed between the driving member and the specimen holder to couple both members operationally while to be engaged rotatably at the coupling point. CONSTITUTION:A coupling member or a rolling member 32 is placed between the drive member 31 and the specimen holder 5 to couple them operationally. A tip face 5a is formed at the tip of the specimen holder 5 and extends perpendicularly against X-axis upon coincidence of the axis of the specimen holder with X-axis. While a rolling member having an arched face 32 is employed. The specimen holder 5 is subjected to the force F1 perpendicular with said face 5a at the point (P) on the tip face where said force F1 is directed to the inside of the diameter of the specimen holder 5 thus to never cause flexure at the tip of the specimen holder 5. Consequently the specimen can be moved in the horizontal face with high accuracy.

Description

[Detailed Description of the Invention] Kimitsuaki (J1 electron beam X-ray sample moving device, especially the possibility of accurately moving a small sample sample) An electron beam device, such as an electron microscope
Insert it from the direction perpendicular to the optical axis.
There is a method using a lead-en-type sample transfer device. Such a side engine 1 ~ Leak Ino's trial 1
As a conventional example of a 1-movement neck, there is one shown in FIGS. 1 to 3, for example.

, = In these figures, the symbol 1 is the mirror 6 of the electron microscope that forms the 1J electron beam red path 30 on the light i1+I+ (representing the Z axis); 1, ? ``a53G'' indicates the lower magnetic pole of the objective lens, which consists of both parts (A constitutes the basic structure of the electron microscope). Reference numeral 2 has a lumen 20 and a mirror [:11 nora! A cylindrical inclined body rotatably inserted into the cylindrical body, the axis of which is placed to intersect the optical axis 7, and the inner cavity 20 of the inclined body 2.
(51) has a spherical part 3 with a rotation center point 8 at the tip,
A holding cylinder 4 having an insertion opening 21 is inserted concentrically and rotatably. IIT of holding tube 4 + population 21
A sample holder 5 is movably inserted concentrically therein. The movement of the sample boulder 5 is carried out using a key 13 embedded in the sample holder 5 and a key formed in the holding cylinder 4.
It is regulated by engagement with 2. Try it! 1 Polgoo 5
The tip (vacuum side) is inserted between the measurement value 4 of the objective lens (U not shown) and the lower vA pole 6, and a sample 7 is attached to the part intersecting the optical axis Z. The holding cylinder 1 is loaded at its base end into a set screw 8 screwed onto the inclined body 2, a ball 22, and a four part 1G formed on the inclined body 2 on the opposite side of the set screw 8 with respect to the axis X. The sample 7 is horizontally moved in a direction perpendicular to the axis X of the sample holder 5 and the optical axis 7 (Y direction) by rotating around the spherical part 3 by a moving operation member consisting of a spring 9. I'm so excited. Also, holding cylinder/l Ll, - group (M
: A set screw 10 screwed into the inclined body 2 at the part Jy,
j, a moving operation part (by Δ) consisting of a spring 11 loaded in a recess 11 formed in the inclined body 2 on the opposite side of the set screw 10 with respect to the axis X,
It is rotated around the spherical bearing part 3 (v), and the trial 1
7 in the direction that blurs the optical axis 7, the vertical II'1 displacement force IL
ru,'',) (konate).

j'July 14 (J) A drive rod movably penetrated and held at 11 of the lens barrel 1 (the drive rod 14 is connected to the axis X of the tilting body 2 and the 1111). ), but it is placed on the curvature 1 side of the insertion position of the sample holder 5 into the lens barrel 1 with the optical axis 7 as the center.
4'A, the end, that is, the vacuum side, is placed in a housing recess 1° formed in the lens barrel 1, and is supported by a predetermined support means. jiJ! to the tip i:'l of the sample holder 5 through the connected connecting rod 15! Conclusion.

3, this connection rod 15 is connected to the small router 5 and the drive (+14), and each connection point B and 0 molecule = 1
(l; η, for example (concave and convex 41.t. It is engaged so that it can rotate freely.

On the other hand, the tip of a push screw screwed into the lens barrel 1 is engaged with the base end, ie, the popular side, of the drive rod 14 via a ball 24. Therefore, when the push screw 19 is turned to move it back and forth, the back and forth movement is transmitted to the drive rod 14, so the connecting rod 15 and the sample holder 5 move in the axis X direction.
817 moves in the X direction. As a result, by arbitrarily operating push screws 8 and 19, test Fl 7 was
It can be moved horizontally in any direction within a plane. On the other hand, when the tilting body 2 is rotated, the spherical part 3, the holding tube 4, and the sample holder 5 rotate, so that the sample 7 can be tilted about the X axis. O-rings 25° and 26° are installed between the lens barrel 1 and the holder @ 4, and between the holder tube 4 and the sample holder 5, respectively.
The space between the lens barrel 1 and the drive rod 14 is O-
It is sealed by a ring 27.

By the way, in the conventional sample 1 moving device, in order to smoothly swing the sample 171 holder 5 when moving the sample 7 in the Y direction, the sample 171 holder 5 is moved smoothly. j
There is no connecting rod 1j) interposed between the two parts 4j, 17 and 4+14, so that the connecting rod 15 is rotated between the two parts 4; :r+(:l"l There are various problems that may arise with the back movement operation of 7) [or with the vertical movement operation.

For example, (31, trial 3゛≧17 (a--operate the set screw 8 degrees 194 times in order to move the back surface) (suppose that the condition η-2 is set as shown in Fig. 2. The engagement state of the trial 1 holder 5, connecting rod 15, and drive rod 14 is modeled (and exaggerated as J in Figure 4. As shown in this figure, Trial O'31 Holgu 5 is rotation center point A
It rotates with respect to α(d), and the rotation center 15, which is 1゛1', is β with respect to f and 10 as the center. As shown in the figure, the angular deviation of θ−・α1β will be affected.For this reason, the push screw 19 is moved forward to move the sample 7 to the right in the second position. The tip of the truder (: 1 force or force in the direction shifted by θ with respect to the axis of the sample 5) is applied.For this reason, Sample holder 5
Therefore, a moment 1 of a certain magnitude is applied, causing the distal end 11 of the sample holder 5 to be deflected at the rotation support point Δ at the fulcrum 1). After this bending deformation occurs, sample A'1 is moved in the
7 moves with 1 no. Next, sample 7 was placed at
When the push screw 19 and drive rod 14 are moved back in order to move in the J direction, the sample holder is bent during the previous forward movement! ] The tip of 1105°L returned to its original state at a glance, and then sample 7
, the L drive rod 14 moves in the backward direction. Therefore, when the sample 7 moves in the X direction on the X-Y plane, a constant steresis occurs.

In addition, for the × movement of j, C test 1°j+ 7, a Y movement also occurs due to the operation of the push screw 19 and the drive rod 14, and it is correct! 1fr <T movement is not possible.

Furthermore, in such a conventional trial moving device, if the WFi weight of the connecting rod 1jI is W and the distance 1 from the connecting point B to the connecting point C is 1-, then the connecting rod 15 has a weight of W. A moment of 1~/2 is always added to J5, so it is easily affected by external vibration.

The present invention is based on this Δ, eel 1. η Focusing on the problems since then, \re/,: b, so try moving E)+ to ilF M
The purpose of this invention is to provide an elegant mobile device that can be used for a variety of purposes.

B. In order to achieve this purpose, the present invention sets a relatively small distance between the drive part side installed in the electron beam device and the tip end of the sample holder. The drive unit (
I tried to connect the two parts +4 to the IT dynamic connection, and connected J5 to each connection point.
7. A rolling element is used as a connecting member that is rotatably engaged with the second,
This rolling element is removably engaged with one of the sample holders (1) and the drive unit (1).
, at least one side has a curved surface relative to the other in the rotation axis direction of the sample holder, and the pair 1>s
The summary of the sample moving device with +, / is 1) +l 'l' 71 The combined part of the moving 1 system has at least one curved surface, 11!! (, 15 plane or curved surface, and even It may be a spherical surface, and due to the rotation of the C sample holder, the distortion and noise will be extremely small compared to fI''L. In history, if the engaging parts of both members are shifted to a curved surface at the transfer engaging part, it is also possible to correct the angular deviation caused by the rotation of the trial holder.1 Therefore, C1 trial O(
When you want to horizontally move the sample holder by operating the push screw, the external force transmitted through the drive member and the connecting member is 1); 5 to O: Prevents bending of the part and allows sample movement without hysteresis. 51. Since the drive part H and the tip of the sample holder are very close to each other, there is a connecting part (A to J).
: The moment 1 ~ almost acts and becomes 4, which is affected by external vibration ν? Embodiments of the present invention will now be described in detail with reference to the drawings in Appendix 1.

FIGS. 5 and 6 (FIGS. 11A and 11B show a first embodiment of the present invention.
Take f = I side and (,1 opposite side -(' , &n
The drive member 31 (corresponding to the conventional drive rod 14), which is attached to the cylinder 1, is a relatively open body. (,
1. A small gap S is formed. And the drive section 471
31) between the test F1 boulder and Fi (J is the rolling element 32 on the connection side (corresponding to the j1p connection rod 15 in conventional 1)), and trial 1
'l Holter 5 is operationally connected, (test PI = l
＼The tip of the glue is a flat tip! ia is on the right, and this plane 5a extends in the h-direction with respect to the X-axis where the +ki center of the sample holder coincides with the X-axis.

On the other hand, the rolling element 32 has, for example, one rolling element that extends over the arcuate curved surface 32 as shown in FIG. ;i; ('
, cut out a cylindrical body with a circular cross section to form a C (cut, and test the curved surface 32 of the boulder at the light end of the boulder, i.e. 15 m
2nd surface F) is placed in contact with n. In addition, the curved surface 32
The center of coincides with the center of circle G, and this center point/B center C,! - JS 7C is engaged with the tip of the drive member 31 for rotation. Note that the sample holder 5 has a point 0 (1) on the curved surface 32a of the rolling element 32 at the end of the (7) part. Therefore, the sample holder is rotated at a predetermined angle γ around the rotation center Δ (j is rotated μl).
To be. Due to this rotation, the rolling element 321 rotates around the center point C of one rotation, and is a minute distance d from the contact point between the sample holder 5 and the rolling element (, 1, 0 with respect to the X axis). Change I
Move to Q-shita-P. For this reason, the sample holder 21i receives a force ``1'' which is perpendicular to the plane 5a at a point P on its tip surface and receives 1J.
However, since this force ``1'' is inside the diameter of the sample holder 5 (that is, the width of the sample holder 5 in Figure 6), the tip of the sample holder 5 is bent. Therefore, when moving the sample 1'l in a horizontal plane, the moving box 1α can be moved very accurately.

Figures 7 to 9 are diagrams showing a second embodiment of the invention. In this embodiment, a transfer member (A
Y32 and 5 are in contact with each other with curved surfaces that circumscribe each other at the engagement part a3.

That is, the tip end surface of the sample holder is shown in No. 712I-(J-
J: It is formed in the cylindrical part 5b which is curved in the width direction of the sea urchin.The rolling element has a cylindrical curved surface similar to that of the first embodiment. A rolling element is used.Thus, the cylindrical portion 51) of the sample holder and the curved surface 32a of the rolling element are in circumscribed contact with each other at a point 9 (13). !, two cylindrical surfaces E)
b Llj Centered on point A shown in Figures 8 and 9 +
It is desirable that θY consists of 7 parts of the circle 1-1.

, the curved surface 32a lj5 of the single rolling element forms a part of a circle G having the center C as its center, similar to (1j1) in the first embodiment.

(111) In order to shift the structure to the right, the sample J'l 7 is moved horizontally, and the sample boulder 5 is rotated around the center point A. Trial I' The relationship between the revolver 55 and the rolling element 32 is as shown in FIG.

This figure hs + 1) If J is revealed within the length range of the curved surface 32a of the sea urchin rolling element, then the base 11 holder 5 is rotated around the center of rotation Δ and -C within the horizontal plane. Rotate it and try N'! The 1 holder 5 and the rolling elements 32 are always in contact with each other on the X axis, and the driving force from the drive member 31 is controlled to X IIvl+ to transfer it to the trial holder.Attempt 1 holder 137 The mowing between the point O and the point Q is the M method between the tenth point O9 and the point P.
(Since the sample holder 5 receives the force F2 directed toward the rotation center point A at a point Q inside the diameter of the sample holder 5, the sample holder 5 does not undergo any bending deformation, and the sample movement is extremely accurate. can be made to do so.

4r, in the first embodiment and the second embodiment, C is that the engagement portion between the driving portion 31 and the rolling element 32 is such that the base end of the rolling element 32 is formed into a frame shape, while the driving portion By forming the distal end of the lug 31 into a gate shape, both members 31 and 32 are pivotally engaged. However, it is of course possible to reverse this wedge and gate-like structure. Figure 10 shows this J: Ui 1 drive All shrine 31
FIG. 10 is a diagram showing an example in which the engagement relationship of the rolling elements 32, which are part of the chain, is reversed. That is, the drive part (A31 is formed with a sharp frame shape at the tip Q) - b-1 The 19th end of the transverse body is a semi-concave bearing part that corresponds to the tip of the drive member 31. is formed, and the driving member 31 and rolling element 32 are pivoted.
~It is connected C. In addition, trial boulder; 5 and rolling element 32
The engaging portion has a curved surface as in the second embodiment.

If both the engagement part of this joint joint part shrine and the sample 11 holder 5 are made into a curved surface, in the horizontal plane (jru sample O'≧1
It is clear that the movement is extremely 1 F too 'C, i-+L l'l '7's ll'i il'l movement (nu For this reason, even though the second embodiment had a surface that was +Ii (adopted 1: the curved surface was a circle 11),
y - (', ' lIf these curved surfaces are formed into spherical surfaces, the center point of one person rotating the sample holder 5 A/!: Rotation in the horizontal direction from the center and o' iTi rotation in both directions - One rolling element 32 can be moved to jQ gold, and the sample boulder -5 and 417.' movement 1 ho 32 etc. can always be aligned with the tilt axis of sample 7. Q
IJ, J) (Can be joined, but -) (, By rotating the inclination 14.2, the sample holder 5 is 1+'i 117 +,, trial 1'il 7 wo >1',
'I'llll 7 ni vs.

The rolling elements 32 i, i +'+'l' If can be kept in contact. Furthermore, when a spherical surface is used as the curved surface,
The rotation Φλ center J2C part of the rolling element 32 (JL is formed in a circular string shape 1, Ll, and the ′ of the driving part 4A31) 1L
At the end, a 'l'lll i part° corresponding to the shape of 1: arrangement 111 is formed. / 10th
It is also possible to form four parts of a circle 111 shape at i and l* of the figure ((: ilj, circle It-shaped bearing R11 at the tip of the drive part 1A37, rolling f-ho 31).

According to the present invention, the small drive section (A) is set to a relatively small size, and the gap between the tip of the sample holder and the tip of the drive section (A) is narrowed. By inserting a rolling element between this time and operatively connecting the sample holder and the driving member, the bending moment applied to the tip of the sample holder due to the horizontal movement of test 4'81 can be reduced to zero.
In addition, the horizontal movement of the sample can now be carried out extremely accurately using Jζ. The connecting member between the sample holder and the driving member must be of 0 dimension.
[-Me, the moment applied to the connecting member itself becomes extremely small, and it is almost impossible to receive L131□2' caused by external vibration as in the conventional 1J. It's gone.

In addition, as another embodiment, the tip of the sample holder may be formed in a convex or concave shape, while the contact portion of the sample holder may be formed in a concave or convex shape. When one covers the other with a curved surface, 1 and I are formed on the drive member formed in the shape of a shell.
Jru(IJ1 construction and -1,>,1,i. In this case,
Regarding horizontal movement, it is different from the conventional example [However, 1 memo 1 due to external vibration! , dewo it・(Rikoto C saru.

[Brief explanation of the drawing]

9] Figure '1 +, t r, showing the sample moving device for one bundle of electron beam equipment. 11 Horizontal sectional view, Figure 2 1. iThe above conventional trial 1
Figure 17 shows the moving state,
Figure 3 shows the actuating part of the target for horizontally moving the sample 1'+1 holder in the conventional sample O'≧1 moving device (15). Figure 4 shows the positional relationship formed by the sample hole, connecting rod, and drive rod during operation in Figure 2.
t')"?:, is a schematic diagram without exaggerating the deviation, and FIG. 5 is a sample A' of the electron beam apparatus according to the '1st embodiment of the present invention.
81 is a horizontal cross-sectional view showing the position of the moving station, and FIG. The figure shows trial 1 movement 4/, according to the second embodiment of the present invention.
Fig. 8 is a perspective view of the sample boulder 1 connecting member and the drive 0 no part shrine used in the installation. i example (
, -1 A horizontal cross-sectional view showing the structure of the +1 moving device. The sectional view, FIG. 10, shows the second fruit 7711!
FIG. 4 is a horizontal cross-sectional view showing an example in which the engaging portion with the first shrine is modified. 1...5γ'L'G8
2-11nj and 1 Iho 3...Spherical part
4... Holding cylinder 5... Sample holder 6...
Lower magnetic pole 7... Trial 1 8.10.19... Push rod (operating member) 14... Drive rod 15... Connecting rod 30... Electron beam path 31... Drive section ( A32...Rolling element (connecting member) 5a...Flat surface 32a...Curved surface (cylindrical surface, 1 spherical surface) 5 b...Curved surface, cylindrical surface, 2 spherical surfaces) 1, "1 ε'1 Applicant Stock Page 1';J' (no change in content) of the drawings of the company Kokusai Seiko Figure 1 Figure 2 Figure 3 Figure 5 Figure 7 Figure 5 Figure 8 Procedural amendment (method) June 23, 1980 Do・1 Mr. Kazuo Wakasugi, Commissioner of the Approved Authority]! 11 A'1 Indication Show+I+ 1958 Patent Application No. 6F-2 D2 Name of Invention Sample Moving Device for Electron Beam Device 3, Person Making Amendment 2j Related Patent Applicant (1+l+j 1-29-19 Akatsuki-cho, Hachioji-shi, Tokyo Name: Rshin Co., Ltd. Kokusai Seiko 4.1 Agent Address: 105 Telephone: 580-8931
No. 6 Supplement 1 [Part 4]: Increased number of inventions 7, subject to amendment

Claims (1)

[Scope of Claims] 1) A sample holder that is placed in a lens barrel in which an electron beam path is formed, with the 1lIIb core perpendicular to the electron beam axis, and that is orthogonal to the electron beam axis and that holds the sample. , a means for moving the uC trial 1 in a direction perpendicular to the axis of the sample boulder, and a means installed on the opposite side of the insertion position of the sample holder with respect to the electron beam axis. 1, ': C'A'M A drive unit (A) that moves the holder against the holding cylinder, and a drive unit (A) that is interposed between the drive member and the sample boulder and connects both parts (Δ) 1], and for each connection J, π, 13 and η
and a connecting member rotatably engaged with the sample j′(
In the No. 1 moving equipment, the connecting member is a rolling element that rotatably engages with either the test No. 11 small rug or the drive member, and this rolling engagement portion is connected to the test No. 1'11 holder. 4. A sample moving device for an electron beam apparatus, characterized in that at least one side faces the other side with a curved surface in a rotating direction. 2) At the engagement part between the connecting member and the sample holder,
Test 1': The tip of the 1 holder is formed flat in the rotating direction of the sample holder, while the tip of the connecting member is formed into a curved surface so as to circumscribe the tip of the sample holder. A trial moving device for an electron beam device according to claim 1. 3) The electron beam device according to claim 1, wherein the connecting member and the sample holder are molded at the engaging portion and are fitted with a curved surface that circumscribes them. sample moving device. 4) A curved surface formed on the connecting member or the trial boulder (1, claim 1, characterized in that it has a cylindrical shape that curves in the rotational direction of the trial boulder) A trial 1 moving device for an electron beam apparatus according to any one of items 3 to 3.5) Claims characterized in that the curved portion formed in the connecting portion (A or the trial holder) has a spherical shape. The electric-I' wire according to any one of paragraphs 1 to 4)4
ii'f (1) 6+(N'l movement"J 1iff
. 6) Connecting portion 4.4 ,, J: or trial '(shij＼The curving center of the curved surface formed by the holder is characterized by the same φ!1 center iJ of the member having the curved surface. Test A') 1. A moving device for electronic beam translation h' according to any one of claims 1 to 5j.