JPS5629130A - Temperature sensor - Google Patents
Temperature sensorInfo
- Publication number
- JPS5629130A JPS5629130A JP10455479A JP10455479A JPS5629130A JP S5629130 A JPS5629130 A JP S5629130A JP 10455479 A JP10455479 A JP 10455479A JP 10455479 A JP10455479 A JP 10455479A JP S5629130 A JPS5629130 A JP S5629130A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- support base
- heat
- anticorrosion
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 abstract 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 abstract 2
- 239000004065 semiconductor Substances 0.000 abstract 2
- XHCLAFWTIXFWPH-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] XHCLAFWTIXFWPH-UHFFFAOYSA-N 0.000 abstract 1
- 238000001514 detection method Methods 0.000 abstract 1
- 238000005553 drilling Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 238000009413 insulation Methods 0.000 abstract 1
- 238000002955 isolation Methods 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 229910003446 platinum oxide Inorganic materials 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 abstract 1
- 229910010271 silicon carbide Inorganic materials 0.000 abstract 1
- 229910001935 vanadium oxide Inorganic materials 0.000 abstract 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Thermistors And Varistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10455479A JPS5629130A (en) | 1979-08-16 | 1979-08-16 | Temperature sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10455479A JPS5629130A (en) | 1979-08-16 | 1979-08-16 | Temperature sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5629130A true JPS5629130A (en) | 1981-03-23 |
| JPS6359083B2 JPS6359083B2 (enrdf_load_stackoverflow) | 1988-11-17 |
Family
ID=14383679
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10455479A Granted JPS5629130A (en) | 1979-08-16 | 1979-08-16 | Temperature sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5629130A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6140526A (ja) * | 1984-07-31 | 1986-02-26 | Mitsuteru Kimura | 温度センサ |
| JPS61116631A (ja) * | 1984-11-12 | 1986-06-04 | Nok Corp | 薄膜サ−ミスタおよびその製造法 |
| JPH0419949U (enrdf_load_stackoverflow) * | 1990-06-12 | 1992-02-19 | ||
| US6614095B1 (en) * | 1998-06-04 | 2003-09-02 | Gfd-Gesellschaft Fur Diamantprodukte Mbh | Diamond component with rear side contact and a method for the production thereof |
-
1979
- 1979-08-16 JP JP10455479A patent/JPS5629130A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6140526A (ja) * | 1984-07-31 | 1986-02-26 | Mitsuteru Kimura | 温度センサ |
| JPS61116631A (ja) * | 1984-11-12 | 1986-06-04 | Nok Corp | 薄膜サ−ミスタおよびその製造法 |
| JPH0419949U (enrdf_load_stackoverflow) * | 1990-06-12 | 1992-02-19 | ||
| US6614095B1 (en) * | 1998-06-04 | 2003-09-02 | Gfd-Gesellschaft Fur Diamantprodukte Mbh | Diamond component with rear side contact and a method for the production thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6359083B2 (enrdf_load_stackoverflow) | 1988-11-17 |
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