JPS5624933A - Method of detecting position of reference mark - Google Patents
Method of detecting position of reference markInfo
- Publication number
- JPS5624933A JPS5624933A JP10087479A JP10087479A JPS5624933A JP S5624933 A JPS5624933 A JP S5624933A JP 10087479 A JP10087479 A JP 10087479A JP 10087479 A JP10087479 A JP 10087479A JP S5624933 A JPS5624933 A JP S5624933A
- Authority
- JP
- Japan
- Prior art keywords
- reference marks
- substrate
- electron beam
- marks
- scanned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Image Input (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10087479A JPS5624933A (en) | 1979-08-08 | 1979-08-08 | Method of detecting position of reference mark |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10087479A JPS5624933A (en) | 1979-08-08 | 1979-08-08 | Method of detecting position of reference mark |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5624933A true JPS5624933A (en) | 1981-03-10 |
JPS6234135B2 JPS6234135B2 (ja) | 1987-07-24 |
Family
ID=14285459
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10087479A Granted JPS5624933A (en) | 1979-08-08 | 1979-08-08 | Method of detecting position of reference mark |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5624933A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61165185A (ja) * | 1984-12-28 | 1986-07-25 | Fujitsu Ltd | 基準点座標自動検出装置 |
US5336895A (en) * | 1991-06-17 | 1994-08-09 | Sharp Kabushiki Kaisha | Impurity free reference grid for use charged partiole beam spectroscopes |
US7553537B2 (en) * | 2004-03-18 | 2009-06-30 | Hewlett-Packard Development Company, L.P. | Position identification pattern |
-
1979
- 1979-08-08 JP JP10087479A patent/JPS5624933A/ja active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61165185A (ja) * | 1984-12-28 | 1986-07-25 | Fujitsu Ltd | 基準点座標自動検出装置 |
JPH0312345B2 (ja) * | 1984-12-28 | 1991-02-20 | Fujitsu Ltd | |
US5336895A (en) * | 1991-06-17 | 1994-08-09 | Sharp Kabushiki Kaisha | Impurity free reference grid for use charged partiole beam spectroscopes |
US7553537B2 (en) * | 2004-03-18 | 2009-06-30 | Hewlett-Packard Development Company, L.P. | Position identification pattern |
Also Published As
Publication number | Publication date |
---|---|
JPS6234135B2 (ja) | 1987-07-24 |
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