JPS56168535A - Method for measuring surface bearing - Google Patents

Method for measuring surface bearing

Info

Publication number
JPS56168535A
JPS56168535A JP7233880A JP7233880A JPS56168535A JP S56168535 A JPS56168535 A JP S56168535A JP 7233880 A JP7233880 A JP 7233880A JP 7233880 A JP7233880 A JP 7233880A JP S56168535 A JPS56168535 A JP S56168535A
Authority
JP
Japan
Prior art keywords
ray
specimen
deltah
irradiated
thetar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7233880A
Other languages
Japanese (ja)
Other versions
JPH0239738B2 (en
Inventor
Jiyunji Matsui
Yoshinari Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP7233880A priority Critical patent/JPH0239738B2/en
Publication of JPS56168535A publication Critical patent/JPS56168535A/en
Publication of JPH0239738B2 publication Critical patent/JPH0239738B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To enable the slanted angle from a specified lattice face of a single crystal plane to be measured with a high precision of about 1/1,000 deg., by measuring the distance between two peaks in a locking curve. CONSTITUTION:An X-ray beam 2 irradiated from a ray source 1 passes slits 3 and 4, is applied on a monochrometer 5, and becomes approximately parallel X-ray beams. Said X-ray beams are irradiated on a specimen 7, and rotated around the axis O of the specimen 7. The intensity of a reflected X-rays 8 are measured by a counter 9, and the X-ray locking curve is obtained. In the case incident X-ray OR (and OT) are inputted to the surface of a specimen 30 at a shallow angel, a large peak appears at a position thetaR which is separated by a normal black angle thetaB-DELTAH by a reflected X-ray HR. In the case part of OT is irradiated to the side of the specimen, it is diffracted in the specimen 30 and outptted as an X-ray HT, and the small peak is obtained at position thetaT. The value of the distance DELTAH can be directly measured approximately by a formula DELTAH=thetaR-thetaBapprox.=thetaR-thetaT.
JP7233880A 1980-05-30 1980-05-30 MENHOISOKUTEIHOHO Expired - Lifetime JPH0239738B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7233880A JPH0239738B2 (en) 1980-05-30 1980-05-30 MENHOISOKUTEIHOHO

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7233880A JPH0239738B2 (en) 1980-05-30 1980-05-30 MENHOISOKUTEIHOHO

Publications (2)

Publication Number Publication Date
JPS56168535A true JPS56168535A (en) 1981-12-24
JPH0239738B2 JPH0239738B2 (en) 1990-09-06

Family

ID=13486400

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7233880A Expired - Lifetime JPH0239738B2 (en) 1980-05-30 1980-05-30 MENHOISOKUTEIHOHO

Country Status (1)

Country Link
JP (1) JPH0239738B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS597252A (en) * 1982-07-05 1984-01-14 Nec Corp Method and apparatus for measuring inclined angle of crystal surface
JPS63225158A (en) * 1987-03-14 1988-09-20 Ricoh Co Ltd Radiation diffraction apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS597252A (en) * 1982-07-05 1984-01-14 Nec Corp Method and apparatus for measuring inclined angle of crystal surface
JPS63225158A (en) * 1987-03-14 1988-09-20 Ricoh Co Ltd Radiation diffraction apparatus

Also Published As

Publication number Publication date
JPH0239738B2 (en) 1990-09-06

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