JPS56166375A - Vapor depositing device by magnetron sputtering - Google Patents

Vapor depositing device by magnetron sputtering

Info

Publication number
JPS56166375A
JPS56166375A JP6981180A JP6981180A JPS56166375A JP S56166375 A JPS56166375 A JP S56166375A JP 6981180 A JP6981180 A JP 6981180A JP 6981180 A JP6981180 A JP 6981180A JP S56166375 A JPS56166375 A JP S56166375A
Authority
JP
Japan
Prior art keywords
cathode
moved
prescribed
vapor depositing
door
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6981180A
Other languages
English (en)
Inventor
Hitoshi Ogi
Shinya Iida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Kokusai Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Co Ltd filed Critical Kokusai Electric Co Ltd
Priority to JP6981180A priority Critical patent/JPS56166375A/ja
Publication of JPS56166375A publication Critical patent/JPS56166375A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Thin Magnetic Films (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP6981180A 1980-05-26 1980-05-26 Vapor depositing device by magnetron sputtering Pending JPS56166375A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6981180A JPS56166375A (en) 1980-05-26 1980-05-26 Vapor depositing device by magnetron sputtering

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6981180A JPS56166375A (en) 1980-05-26 1980-05-26 Vapor depositing device by magnetron sputtering

Publications (1)

Publication Number Publication Date
JPS56166375A true JPS56166375A (en) 1981-12-21

Family

ID=13413509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6981180A Pending JPS56166375A (en) 1980-05-26 1980-05-26 Vapor depositing device by magnetron sputtering

Country Status (1)

Country Link
JP (1) JPS56166375A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04108621U (ja) * 1991-02-26 1992-09-21 功 謝敷 螺旋杭および螺旋杭駆動装置の駆動軸構造
JPH0656138U (ja) * 1991-04-15 1994-08-05 清 小川 螺入式棒杭

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04108621U (ja) * 1991-02-26 1992-09-21 功 謝敷 螺旋杭および螺旋杭駆動装置の駆動軸構造
JPH0656138U (ja) * 1991-04-15 1994-08-05 清 小川 螺入式棒杭

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