JPS56163752A - Method and device for vapor phase growth - Google Patents

Method and device for vapor phase growth

Info

Publication number
JPS56163752A
JPS56163752A JP6707980A JP6707980A JPS56163752A JP S56163752 A JPS56163752 A JP S56163752A JP 6707980 A JP6707980 A JP 6707980A JP 6707980 A JP6707980 A JP 6707980A JP S56163752 A JPS56163752 A JP S56163752A
Authority
JP
Japan
Prior art keywords
tube
vapor phase
substrates
temp
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6707980A
Other languages
Japanese (ja)
Inventor
Kenya Nakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6707980A priority Critical patent/JPS56163752A/en
Publication of JPS56163752A publication Critical patent/JPS56163752A/en
Pending legal-status Critical Current

Links

Landscapes

  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE: To permit production of multiple pieces of substrates of a large area at one time by maintaining the temp. in a tube substantially uniform over the section of the tube on the lower stream of the heating area of a vapor phase growing device.
CONSTITUTION: A partition 13 which divides the cross section of the reaction tube 11 of a vapor phase growing device to plural pieces is provided in the gas lower stream part of the tube 11, and means such as heating coils 15 that can control temp. independently are provided in the respective divided areas. If the temp. differences between the upper and lower parts are eliminated by heating the lower parts in the lower stream part, the substrates dispersed in the lower part grow at the rates similar to those of the substrates in the upper part. Hence, the products are made homogeneous in quality and are produced in a large number at one time.
COPYRIGHT: (C)1981,JPO&Japio
JP6707980A 1980-05-22 1980-05-22 Method and device for vapor phase growth Pending JPS56163752A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6707980A JPS56163752A (en) 1980-05-22 1980-05-22 Method and device for vapor phase growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6707980A JPS56163752A (en) 1980-05-22 1980-05-22 Method and device for vapor phase growth

Publications (1)

Publication Number Publication Date
JPS56163752A true JPS56163752A (en) 1981-12-16

Family

ID=13334499

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6707980A Pending JPS56163752A (en) 1980-05-22 1980-05-22 Method and device for vapor phase growth

Country Status (1)

Country Link
JP (1) JPS56163752A (en)

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