JPS56163752A - Method and device for vapor phase growth - Google Patents
Method and device for vapor phase growthInfo
- Publication number
- JPS56163752A JPS56163752A JP6707980A JP6707980A JPS56163752A JP S56163752 A JPS56163752 A JP S56163752A JP 6707980 A JP6707980 A JP 6707980A JP 6707980 A JP6707980 A JP 6707980A JP S56163752 A JPS56163752 A JP S56163752A
- Authority
- JP
- Japan
- Prior art keywords
- tube
- vapor phase
- substrates
- temp
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
PURPOSE: To permit production of multiple pieces of substrates of a large area at one time by maintaining the temp. in a tube substantially uniform over the section of the tube on the lower stream of the heating area of a vapor phase growing device.
CONSTITUTION: A partition 13 which divides the cross section of the reaction tube 11 of a vapor phase growing device to plural pieces is provided in the gas lower stream part of the tube 11, and means such as heating coils 15 that can control temp. independently are provided in the respective divided areas. If the temp. differences between the upper and lower parts are eliminated by heating the lower parts in the lower stream part, the substrates dispersed in the lower part grow at the rates similar to those of the substrates in the upper part. Hence, the products are made homogeneous in quality and are produced in a large number at one time.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6707980A JPS56163752A (en) | 1980-05-22 | 1980-05-22 | Method and device for vapor phase growth |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6707980A JPS56163752A (en) | 1980-05-22 | 1980-05-22 | Method and device for vapor phase growth |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56163752A true JPS56163752A (en) | 1981-12-16 |
Family
ID=13334499
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6707980A Pending JPS56163752A (en) | 1980-05-22 | 1980-05-22 | Method and device for vapor phase growth |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56163752A (en) |
-
1980
- 1980-05-22 JP JP6707980A patent/JPS56163752A/en active Pending
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