JPS51124839A - Infrared ray baking furnace - Google Patents

Infrared ray baking furnace

Info

Publication number
JPS51124839A
JPS51124839A JP4968075A JP4968075A JPS51124839A JP S51124839 A JPS51124839 A JP S51124839A JP 4968075 A JP4968075 A JP 4968075A JP 4968075 A JP4968075 A JP 4968075A JP S51124839 A JPS51124839 A JP S51124839A
Authority
JP
Japan
Prior art keywords
baking furnace
infrared ray
ray baking
furnace
products
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4968075A
Other languages
Japanese (ja)
Inventor
Tamotsu Sasaki
Toshio Hashimoto
Katsunori Kameyama
Toshihiko Takayanagi
Masato Ishioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4968075A priority Critical patent/JPS51124839A/en
Publication of JPS51124839A publication Critical patent/JPS51124839A/en
Pending legal-status Critical Current

Links

Landscapes

  • Printing Plates And Materials Therefor (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Resistance Heating (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To reduce the fault rate of products by making the temperature distribution inside a whole baking furnace to become uniform.
COPYRIGHT: (C)1976,JPO&Japio
JP4968075A 1975-04-25 1975-04-25 Infrared ray baking furnace Pending JPS51124839A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4968075A JPS51124839A (en) 1975-04-25 1975-04-25 Infrared ray baking furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4968075A JPS51124839A (en) 1975-04-25 1975-04-25 Infrared ray baking furnace

Publications (1)

Publication Number Publication Date
JPS51124839A true JPS51124839A (en) 1976-10-30

Family

ID=12837880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4968075A Pending JPS51124839A (en) 1975-04-25 1975-04-25 Infrared ray baking furnace

Country Status (1)

Country Link
JP (1) JPS51124839A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5735319A (en) * 1980-08-13 1982-02-25 Hitachi Ltd Heat treatment device
JPS5875154A (en) * 1981-10-29 1983-05-06 Toppan Printing Co Ltd Heater
JPS5961027A (en) * 1982-09-29 1984-04-07 Toshiba Corp Semiconductor substrate heating apparatus
JPS64738A (en) * 1988-05-20 1989-01-05 Hitachi Ltd Heat treatment of semiconductor wafer
JPH0253059A (en) * 1988-08-18 1990-02-22 Matsushita Electric Ind Co Ltd Pattern forming method

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5735319A (en) * 1980-08-13 1982-02-25 Hitachi Ltd Heat treatment device
JPH0313735B2 (en) * 1980-08-13 1991-02-25 Hitachi Ltd
JPS5875154A (en) * 1981-10-29 1983-05-06 Toppan Printing Co Ltd Heater
JPH0241163B2 (en) * 1981-10-29 1990-09-14 Toppan Printing Co Ltd
JPS5961027A (en) * 1982-09-29 1984-04-07 Toshiba Corp Semiconductor substrate heating apparatus
JPS64738A (en) * 1988-05-20 1989-01-05 Hitachi Ltd Heat treatment of semiconductor wafer
JPH0424855B2 (en) * 1988-05-20 1992-04-28 Hitachi Ltd
JPH0253059A (en) * 1988-08-18 1990-02-22 Matsushita Electric Ind Co Ltd Pattern forming method

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