JPS561555A - Method of trimming film resistor - Google Patents

Method of trimming film resistor

Info

Publication number
JPS561555A
JPS561555A JP7840479A JP7840479A JPS561555A JP S561555 A JPS561555 A JP S561555A JP 7840479 A JP7840479 A JP 7840479A JP 7840479 A JP7840479 A JP 7840479A JP S561555 A JPS561555 A JP S561555A
Authority
JP
Japan
Prior art keywords
resistor
resistance value
trimming
film resistor
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7840479A
Other languages
Japanese (ja)
Inventor
Toshio Hida
Iwao Onioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7840479A priority Critical patent/JPS561555A/en
Publication of JPS561555A publication Critical patent/JPS561555A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/702—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof
    • H01L21/707—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof of thin-film circuits or parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)

Abstract

PURPOSE:To accurately regulate the resistance value of a fine resistor by trimming a film resistor connected between a pair of electrode conductors from one electrode conductor side. CONSTITUTION:A predetermined voltage is applied between electrode conductors 1a to monitor the resistance value via an electric current of a film resistor 2, the resistor 2 is trimmed at the positions 3a, 3b in parallel with a side connected with an electrode 1a, is roughly regulated with resistors 2a-2c, and the resistor 2c is then trimmed at the position 3c to finely regulate the resistance value. When the number of the trimming positions 3a-3c is determined, the rate of change of the resistance value of the resistor 2 can be determined merely by the ratio of the width D to the width W of the film resistor 2. Accordingly, even if the trimming positions are displaced and the parallelism with the resistor 2 is displaced due to the irregularity of the geometrical size of the supporting substrate of the electrode conductor 1a and the film resistor 2 and of the position and the size of the conductor 1a and the resistor 2, the rate of the chang of the resistance value is not affected to execute the trimming with preferable productivity in high accuracy.
JP7840479A 1979-06-19 1979-06-19 Method of trimming film resistor Pending JPS561555A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7840479A JPS561555A (en) 1979-06-19 1979-06-19 Method of trimming film resistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7840479A JPS561555A (en) 1979-06-19 1979-06-19 Method of trimming film resistor

Publications (1)

Publication Number Publication Date
JPS561555A true JPS561555A (en) 1981-01-09

Family

ID=13661080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7840479A Pending JPS561555A (en) 1979-06-19 1979-06-19 Method of trimming film resistor

Country Status (1)

Country Link
JP (1) JPS561555A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63114157A (en) * 1986-10-30 1988-05-19 Taiyo Yuden Co Ltd Trimming method of film resistor in hybrid integrated circuit
WO2001059793A1 (en) * 2000-02-09 2001-08-16 Robert Bosch Gmbh Adjustable resistor arrangement, method for the production thereof and associated adjustment method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63114157A (en) * 1986-10-30 1988-05-19 Taiyo Yuden Co Ltd Trimming method of film resistor in hybrid integrated circuit
WO2001059793A1 (en) * 2000-02-09 2001-08-16 Robert Bosch Gmbh Adjustable resistor arrangement, method for the production thereof and associated adjustment method

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