JPS56154638A - Semiconductor pressure converter - Google Patents

Semiconductor pressure converter

Info

Publication number
JPS56154638A
JPS56154638A JP5751580A JP5751580A JPS56154638A JP S56154638 A JPS56154638 A JP S56154638A JP 5751580 A JP5751580 A JP 5751580A JP 5751580 A JP5751580 A JP 5751580A JP S56154638 A JPS56154638 A JP S56154638A
Authority
JP
Japan
Prior art keywords
oil
holder
holes
pressure sensing
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5751580A
Other languages
English (en)
Japanese (ja)
Other versions
JPS637334B2 (enrdf_load_stackoverflow
Inventor
Shunji Shiromizu
Ryuzo Noda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5751580A priority Critical patent/JPS56154638A/ja
Publication of JPS56154638A publication Critical patent/JPS56154638A/ja
Publication of JPS637334B2 publication Critical patent/JPS637334B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/142—Multiple part housings
    • G01L19/143—Two part housings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP5751580A 1980-04-30 1980-04-30 Semiconductor pressure converter Granted JPS56154638A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5751580A JPS56154638A (en) 1980-04-30 1980-04-30 Semiconductor pressure converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5751580A JPS56154638A (en) 1980-04-30 1980-04-30 Semiconductor pressure converter

Publications (2)

Publication Number Publication Date
JPS56154638A true JPS56154638A (en) 1981-11-30
JPS637334B2 JPS637334B2 (enrdf_load_stackoverflow) 1988-02-16

Family

ID=13057866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5751580A Granted JPS56154638A (en) 1980-04-30 1980-04-30 Semiconductor pressure converter

Country Status (1)

Country Link
JP (1) JPS56154638A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59159084A (ja) * 1983-03-01 1984-09-08 Citizen Watch Co Ltd 圧力センサー付電子時計の圧力検出部構造
JPS63199044U (enrdf_load_stackoverflow) * 1987-06-10 1988-12-21
WO1998005934A1 (de) * 1996-08-06 1998-02-12 Siemens Aktiengesellschaft Elektronisches sensor-bauelement
CN100465599C (zh) * 2005-12-23 2009-03-04 昆山双桥传感器测控技术有限公司 压阻式土应力传感器
US20150362394A1 (en) * 2012-12-28 2015-12-17 The University Of Tokyo Pressure-sensitive sensor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011236522A (ja) * 2010-05-10 2011-11-24 Japan Vilene Co Ltd 液体供給装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5143980A (ja) * 1974-10-14 1976-04-15 Automobile Antipollution Handotaihizumigeejishikiatsuryokusensa
JPS5123233Y2 (enrdf_load_stackoverflow) * 1971-08-12 1976-06-15
JPS52115103U (enrdf_load_stackoverflow) * 1976-02-27 1977-09-01

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5123233Y2 (enrdf_load_stackoverflow) * 1971-08-12 1976-06-15
JPS5143980A (ja) * 1974-10-14 1976-04-15 Automobile Antipollution Handotaihizumigeejishikiatsuryokusensa
JPS52115103U (enrdf_load_stackoverflow) * 1976-02-27 1977-09-01

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59159084A (ja) * 1983-03-01 1984-09-08 Citizen Watch Co Ltd 圧力センサー付電子時計の圧力検出部構造
JPS63199044U (enrdf_load_stackoverflow) * 1987-06-10 1988-12-21
WO1998005934A1 (de) * 1996-08-06 1998-02-12 Siemens Aktiengesellschaft Elektronisches sensor-bauelement
GB2330418A (en) * 1996-08-06 1999-04-21 Siemens Ag Electronic sensor component
GB2330418B (en) * 1996-08-06 2000-06-07 Siemens Ag Electronic pressure sensor component
CN100465599C (zh) * 2005-12-23 2009-03-04 昆山双桥传感器测控技术有限公司 压阻式土应力传感器
US20150362394A1 (en) * 2012-12-28 2015-12-17 The University Of Tokyo Pressure-sensitive sensor
US9645032B2 (en) * 2012-12-28 2017-05-09 The University Of Tokyo Pressure-sensitive sensor

Also Published As

Publication number Publication date
JPS637334B2 (enrdf_load_stackoverflow) 1988-02-16

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