JPS56133830A - Inspection device for defect of regular pattern - Google Patents

Inspection device for defect of regular pattern

Info

Publication number
JPS56133830A
JPS56133830A JP3684380A JP3684380A JPS56133830A JP S56133830 A JPS56133830 A JP S56133830A JP 3684380 A JP3684380 A JP 3684380A JP 3684380 A JP3684380 A JP 3684380A JP S56133830 A JPS56133830 A JP S56133830A
Authority
JP
Japan
Prior art keywords
signal
defect
type
height
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3684380A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6326321B2 (enrdf_load_stackoverflow
Inventor
Nobuo Tsumita
Shunsuke Mukasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP3684380A priority Critical patent/JPS56133830A/ja
Publication of JPS56133830A publication Critical patent/JPS56133830A/ja
Publication of JPS6326321B2 publication Critical patent/JPS6326321B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP3684380A 1980-03-25 1980-03-25 Inspection device for defect of regular pattern Granted JPS56133830A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3684380A JPS56133830A (en) 1980-03-25 1980-03-25 Inspection device for defect of regular pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3684380A JPS56133830A (en) 1980-03-25 1980-03-25 Inspection device for defect of regular pattern

Publications (2)

Publication Number Publication Date
JPS56133830A true JPS56133830A (en) 1981-10-20
JPS6326321B2 JPS6326321B2 (enrdf_load_stackoverflow) 1988-05-30

Family

ID=12481034

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3684380A Granted JPS56133830A (en) 1980-03-25 1980-03-25 Inspection device for defect of regular pattern

Country Status (1)

Country Link
JP (1) JPS56133830A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6326321B2 (enrdf_load_stackoverflow) 1988-05-30

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