JPS56129645A - Forming method for metallic thin film - Google Patents
Forming method for metallic thin filmInfo
- Publication number
- JPS56129645A JPS56129645A JP3302980A JP3302980A JPS56129645A JP S56129645 A JPS56129645 A JP S56129645A JP 3302980 A JP3302980 A JP 3302980A JP 3302980 A JP3302980 A JP 3302980A JP S56129645 A JPS56129645 A JP S56129645A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- layer
- metallic thin
- deposition method
- low adhesion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title abstract 7
- 238000000034 method Methods 0.000 title abstract 4
- 239000000758 substrate Substances 0.000 abstract 4
- 229910052751 metal Inorganic materials 0.000 abstract 3
- 239000002184 metal Substances 0.000 abstract 3
- 238000001771 vacuum deposition Methods 0.000 abstract 3
- 239000011521 glass Substances 0.000 abstract 2
- 239000000203 mixture Substances 0.000 abstract 2
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 229910052738 indium Inorganic materials 0.000 abstract 1
- 150000002739 metals Chemical class 0.000 abstract 1
Landscapes
- Surface Treatment Of Glass (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3302980A JPS56129645A (en) | 1980-03-12 | 1980-03-12 | Forming method for metallic thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3302980A JPS56129645A (en) | 1980-03-12 | 1980-03-12 | Forming method for metallic thin film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56129645A true JPS56129645A (en) | 1981-10-09 |
JPS631255B2 JPS631255B2 (enrdf_load_stackoverflow) | 1988-01-12 |
Family
ID=12375357
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3302980A Granted JPS56129645A (en) | 1980-03-12 | 1980-03-12 | Forming method for metallic thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56129645A (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63100043A (ja) * | 1986-10-15 | 1988-05-02 | Nippon Sheet Glass Co Ltd | 熱線反射ガラス |
JPH02217382A (ja) * | 1989-02-16 | 1990-08-30 | Tanaka Kikinzoku Kogyo Kk | セラミックス基板へのPtメタライズ法 |
JPWO2015016173A1 (ja) * | 2013-07-29 | 2017-03-02 | 京セラ株式会社 | 配線基板、リード付き配線基板および電子装置 |
-
1980
- 1980-03-12 JP JP3302980A patent/JPS56129645A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63100043A (ja) * | 1986-10-15 | 1988-05-02 | Nippon Sheet Glass Co Ltd | 熱線反射ガラス |
JPH02217382A (ja) * | 1989-02-16 | 1990-08-30 | Tanaka Kikinzoku Kogyo Kk | セラミックス基板へのPtメタライズ法 |
JPWO2015016173A1 (ja) * | 2013-07-29 | 2017-03-02 | 京セラ株式会社 | 配線基板、リード付き配線基板および電子装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS631255B2 (enrdf_load_stackoverflow) | 1988-01-12 |
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