JPS56126751A - Inspecting device for transmission of radiant ray - Google Patents

Inspecting device for transmission of radiant ray

Info

Publication number
JPS56126751A
JPS56126751A JP3139380A JP3139380A JPS56126751A JP S56126751 A JPS56126751 A JP S56126751A JP 3139380 A JP3139380 A JP 3139380A JP 3139380 A JP3139380 A JP 3139380A JP S56126751 A JPS56126751 A JP S56126751A
Authority
JP
Japan
Prior art keywords
irradiation field
substance
inspected
picture
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3139380A
Other languages
English (en)
Inventor
Toshinobu Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3139380A priority Critical patent/JPS56126751A/ja
Publication of JPS56126751A publication Critical patent/JPS56126751A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
JP3139380A 1980-03-11 1980-03-11 Inspecting device for transmission of radiant ray Pending JPS56126751A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3139380A JPS56126751A (en) 1980-03-11 1980-03-11 Inspecting device for transmission of radiant ray

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3139380A JPS56126751A (en) 1980-03-11 1980-03-11 Inspecting device for transmission of radiant ray

Publications (1)

Publication Number Publication Date
JPS56126751A true JPS56126751A (en) 1981-10-05

Family

ID=12330015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3139380A Pending JPS56126751A (en) 1980-03-11 1980-03-11 Inspecting device for transmission of radiant ray

Country Status (1)

Country Link
JP (1) JPS56126751A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991002216A1 (en) * 1989-07-27 1991-02-21 Seiko Instruments Inc. Fluorescent x-ray film thickness gauge
JPH05322803A (ja) * 1992-05-15 1993-12-07 Sony Corp Ｘ線位置合わせ確認方法、ｘ線位置合わせ確認・位置合わせ方法、及びｘ線検査装置
WO2002097366A1 (en) * 2001-05-25 2002-12-05 Hamamatsu Photonics K.K. Observation device using light and x-ray, exposure system and exposure method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991002216A1 (en) * 1989-07-27 1991-02-21 Seiko Instruments Inc. Fluorescent x-ray film thickness gauge
JPH05322803A (ja) * 1992-05-15 1993-12-07 Sony Corp Ｘ線位置合わせ確認方法、ｘ線位置合わせ確認・位置合わせ方法、及びｘ線検査装置
WO2002097366A1 (en) * 2001-05-25 2002-12-05 Hamamatsu Photonics K.K. Observation device using light and x-ray, exposure system and exposure method

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