JPS56126750A - Inspecting device for transmission of radiant ray - Google Patents

Inspecting device for transmission of radiant ray

Info

Publication number
JPS56126750A
JPS56126750A JP3139280A JP3139280A JPS56126750A JP S56126750 A JPS56126750 A JP S56126750A JP 3139280 A JP3139280 A JP 3139280A JP 3139280 A JP3139280 A JP 3139280A JP S56126750 A JPS56126750 A JP S56126750A
Authority
JP
Japan
Prior art keywords
light
ray
scintillator
inspected
substance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3139280A
Other languages
Japanese (ja)
Inventor
Toshinobu Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3139280A priority Critical patent/JPS56126750A/en
Publication of JPS56126750A publication Critical patent/JPS56126750A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Apparatus For Radiation Diagnosis (AREA)

Abstract

PURPOSE:To improve resolution by transducing the radiant ray transmitted through a substance to be inspected into a light and then condensing and amplifying the light. CONSTITUTION:An X-ray 3 transmitted through the substance 4 to be inspected is given to a scintillator 5 for a high-energy X-ray. This scintillator 5 transduces the X-ray 3 into a light 6 efficiently. This light 6, which s emitted in all directions, is condensed by a condensing lens 12, reflected by a reflecting mirror 8 and sent to an imaging lens 9. The lens 9, imaging the light 6, sends the same to a light amplifier 13 and, after amplification thereof, gives the amplified light to a pickup tube 10. Thus, the pickup tube 10 transduces a defect and the like in the substance 4 to be inspected into a video signal having a sharp contrast and indicates the same on a television monitor 11. In this way, by using the scintillator for high-energy X-ray as the scintillator 5 for the device, by providing the condensing lens 12 on the back surface of the scintillator 5 and by providing the light amplifier 13 in front of the pickup tube 10, a picture having excellent S/N ratio and resolution can be indicated on the TV monitor 11.
JP3139280A 1980-03-11 1980-03-11 Inspecting device for transmission of radiant ray Pending JPS56126750A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3139280A JPS56126750A (en) 1980-03-11 1980-03-11 Inspecting device for transmission of radiant ray

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3139280A JPS56126750A (en) 1980-03-11 1980-03-11 Inspecting device for transmission of radiant ray

Publications (1)

Publication Number Publication Date
JPS56126750A true JPS56126750A (en) 1981-10-05

Family

ID=12329988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3139280A Pending JPS56126750A (en) 1980-03-11 1980-03-11 Inspecting device for transmission of radiant ray

Country Status (1)

Country Link
JP (1) JPS56126750A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0230285A2 (en) * 1986-01-18 1987-07-29 Kabushiki Kaisha Toyoda Jidoshokki Seisakusho Method and device for detecting defects of patterns in microelectronic devices
JPS63252132A (en) * 1987-04-08 1988-10-19 株式会社　イナミ Fluorescent eyeground imaging and recording apparatus
CN103149225A (en) * 2013-01-28 2013-06-12 中国科学院高能物理研究所 Novel dual-energy X-ray imaging detector

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50146385A (en) * 1974-04-08 1975-11-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50146385A (en) * 1974-04-08 1975-11-25

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0230285A2 (en) * 1986-01-18 1987-07-29 Kabushiki Kaisha Toyoda Jidoshokki Seisakusho Method and device for detecting defects of patterns in microelectronic devices
JPS63252132A (en) * 1987-04-08 1988-10-19 株式会社　イナミ Fluorescent eyeground imaging and recording apparatus
CN103149225A (en) * 2013-01-28 2013-06-12 中国科学院高能物理研究所 Novel dual-energy X-ray imaging detector
CN103149225B (en) * 2013-01-28 2015-07-01 中国科学院高能物理研究所 Novel dual-energy X-ray imaging detector

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