JPS56119773A - Heater for vacuum deposition - Google Patents

Heater for vacuum deposition

Info

Publication number
JPS56119773A
JPS56119773A JP2297980A JP2297980A JPS56119773A JP S56119773 A JPS56119773 A JP S56119773A JP 2297980 A JP2297980 A JP 2297980A JP 2297980 A JP2297980 A JP 2297980A JP S56119773 A JPS56119773 A JP S56119773A
Authority
JP
Japan
Prior art keywords
heater
layer
vacuum deposition
silver
gold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2297980A
Other languages
Japanese (ja)
Other versions
JPS5952956B2 (en
Inventor
Yasuji Takeuchi
Koreaki Gunjikake
Koichi Matsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP55022979A priority Critical patent/JPS5952956B2/en
Publication of JPS56119773A publication Critical patent/JPS56119773A/en
Publication of JPS5952956B2 publication Critical patent/JPS5952956B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Abstract

PURPOSE:To prolong the life of a heater made of ceramic or the like by forming a surface coating layer on the heater with a Ti, W or Mo carbide layer in-between to inhibit the reaction of the substrate material of the heater with the surface layer. CONSTITUTION:A middle layer of one or more of TiC, WC and MoC is formed by line explosive spraying on the inside of the gold or silver melting vessel of a heater made of electrically conductive ceramic or graphite for vacuum deposition. A layer of one or more of W, Mo and Ta is further formed on the middle layer by line explosive spraying. The resulting heater surface is well fit to molten gold or silver, the middle layer separates the heater material from the surface layer, and high mutual adhesion is obtd. by a mechanical anchoring effect or the like. Accordingly, the vacuum deposition of gold or silver is efficiently carried out, and the heater can be used over a long time.
JP55022979A 1980-02-26 1980-02-26 Heater for vacuum evaporation Expired JPS5952956B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55022979A JPS5952956B2 (en) 1980-02-26 1980-02-26 Heater for vacuum evaporation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55022979A JPS5952956B2 (en) 1980-02-26 1980-02-26 Heater for vacuum evaporation

Publications (2)

Publication Number Publication Date
JPS56119773A true JPS56119773A (en) 1981-09-19
JPS5952956B2 JPS5952956B2 (en) 1984-12-22

Family

ID=12097668

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55022979A Expired JPS5952956B2 (en) 1980-02-26 1980-02-26 Heater for vacuum evaporation

Country Status (1)

Country Link
JP (1) JPS5952956B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0519313U (en) * 1991-08-23 1993-03-09 アキレス株式会社 Apron

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0584232U (en) * 1992-04-23 1993-11-16 ナスステンレス株式会社 cabinet

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0519313U (en) * 1991-08-23 1993-03-09 アキレス株式会社 Apron

Also Published As

Publication number Publication date
JPS5952956B2 (en) 1984-12-22

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