JPS5611225B2 - - Google Patents
Info
- Publication number
 - JPS5611225B2 JPS5611225B2 JP11544074A JP11544074A JPS5611225B2 JP S5611225 B2 JPS5611225 B2 JP S5611225B2 JP 11544074 A JP11544074 A JP 11544074A JP 11544074 A JP11544074 A JP 11544074A JP S5611225 B2 JPS5611225 B2 JP S5611225B2
 - Authority
 - JP
 - Japan
 - Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
 - Expired
 
Links
Classifications
- 
        
- B—PERFORMING OPERATIONS; TRANSPORTING
 - B24—GRINDING; POLISHING
 - B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
 - B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
 - B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
 - B24C1/083—Deburring
 
 - 
        
- B—PERFORMING OPERATIONS; TRANSPORTING
 - B24—GRINDING; POLISHING
 - B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
 - B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
 
 - 
        
- B—PERFORMING OPERATIONS; TRANSPORTING
 - B24—GRINDING; POLISHING
 - B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
 - B24C3/00—Abrasive blasting machines or devices; Plants
 - B24C3/32—Abrasive blasting machines or devices; Plants designed for abrasive blasting of particular work, e.g. the internal surfaces of cylinder blocks
 - B24C3/322—Abrasive blasting machines or devices; Plants designed for abrasive blasting of particular work, e.g. the internal surfaces of cylinder blocks for electrical components
 
 - 
        
- H—ELECTRICITY
 - H01—ELECTRIC ELEMENTS
 - H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
 - H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
 - H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
 - H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
 - H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
 - H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
 - H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
 - H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
 - H01L21/3046—Mechanical treatment, e.g. grinding, polishing, cutting using blasting, e.g. sand-blasting
 
 - 
        
- H—ELECTRICITY
 - H01—ELECTRIC ELEMENTS
 - H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
 - H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
 - H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
 - H01L21/67005—Apparatus not specifically provided for elsewhere
 - H01L21/67011—Apparatus for manufacture or treatment
 - H01L21/67092—Apparatus for mechanical treatment
 
 - 
        
- H—ELECTRICITY
 - H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
 - H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
 - H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
 - H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
 - H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
 - H10D62/103—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
 - H10D62/104—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices having particular shapes of the bodies at or near reverse-biased junctions, e.g. having bevels or moats
 
 
Landscapes
- Engineering & Computer Science (AREA)
 - Mechanical Engineering (AREA)
 - Computer Hardware Design (AREA)
 - Condensed Matter Physics & Semiconductors (AREA)
 - General Physics & Mathematics (AREA)
 - Manufacturing & Machinery (AREA)
 - Physics & Mathematics (AREA)
 - Microelectronics & Electronic Packaging (AREA)
 - Power Engineering (AREA)
 - Thyristors (AREA)
 - Mechanical Treatment Of Semiconductor (AREA)
 - Pressure Sensors (AREA)
 - Crystals, And After-Treatments Of Crystals (AREA)
 
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title | 
|---|---|---|---|
| CH1450973A CH566643A5 (enEXAMPLES) | 1973-10-11 | 1973-10-11 | 
Publications (2)
| Publication Number | Publication Date | 
|---|---|
| JPS5067592A JPS5067592A (enEXAMPLES) | 1975-06-06 | 
| JPS5611225B2 true JPS5611225B2 (enEXAMPLES) | 1981-03-12 | 
Family
ID=4401415
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date | 
|---|---|---|---|
| JP11544074A Expired JPS5611225B2 (enEXAMPLES) | 1973-10-11 | 1974-10-07 | 
Country Status (5)
| Country | Link | 
|---|---|
| US (1) | US3953941A (enEXAMPLES) | 
| JP (1) | JPS5611225B2 (enEXAMPLES) | 
| CH (1) | CH566643A5 (enEXAMPLES) | 
| DE (2) | DE7339254U (enEXAMPLES) | 
| GB (1) | GB1460645A (enEXAMPLES) | 
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title | 
|---|---|---|---|---|
| US4031667A (en) * | 1976-03-29 | 1977-06-28 | Macronetics, Inc. | Apparatus for contouring edge of semiconductor wafers | 
| DE2656070C2 (de) * | 1976-12-10 | 1983-12-08 | Kraftwerk Union AG, 4330 Mülheim | Vorrichtung zum Einarbeiten von Ringnuten um eine mit Dehnungsmeßstreifen versehene Meßstelle | 
| US4247579A (en) * | 1979-11-30 | 1981-01-27 | General Electric Company | Method for metallizing a semiconductor element | 
| DE3124947C2 (de) * | 1981-06-25 | 1985-12-05 | Brown, Boveri & Cie Ag, 6800 Mannheim | Verfahren und Vorrichtung zum Herstellen einer Hohlkehle in der Mantelfläche des Aktivteils eines Leistungshalbleiterbauelements | 
| JPS61108170A (ja) * | 1984-10-31 | 1986-05-26 | ゼネラル・エレクトリツク・カンパニイ | 電力半導体装置に2重正ベベル溝を形成する方法 | 
| EP0264700B1 (de) * | 1986-10-22 | 1991-05-08 | BBC Brown Boveri AG | Verfahren zum Anbringen einer umlaufenden Hohlkehle am Rand einer Halbleiterscheibe eines Leistungshalbleiter-Bauelements | 
| US5010694A (en) * | 1989-08-01 | 1991-04-30 | Advanced Technology Systems, Inc. | Fluid cutting machine | 
| JPH04277625A (ja) * | 1991-03-05 | 1992-10-02 | Murata Mfg Co Ltd | チップ型電子部品の加工方法 | 
| GB2264659B (en) * | 1992-02-29 | 1995-05-24 | Rolls Royce Plc | Abrasive fluid jet machining | 
| US5704824A (en) * | 1993-10-12 | 1998-01-06 | Hashish; Mohamad | Method and apparatus for abrasive water jet millins | 
| FR2789224B1 (fr) * | 1999-01-28 | 2003-10-03 | St Microelectronics Sa | Dressage de bord d'une plaquette semiconductrice | 
| US6705925B1 (en) * | 2000-10-20 | 2004-03-16 | Lightwave Microsystems | Apparatus and method to dice integrated circuits from a wafer using a pressurized jet | 
| JP5793014B2 (ja) * | 2011-07-21 | 2015-10-14 | 株式会社不二製作所 | 硬質脆性材料基板の側部研磨方法 | 
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title | 
|---|---|---|---|---|
| US2886026A (en) * | 1957-08-20 | 1959-05-12 | Texas Instruments Inc | Method of and apparatus for cutting a semiconductor crystal | 
| BE628619A (enEXAMPLES) * | 1962-02-20 | |||
| US3262234A (en) * | 1963-10-04 | 1966-07-26 | Int Rectifier Corp | Method of forming a semiconductor rim by sandblasting | 
| GB1057214A (en) * | 1965-05-11 | 1967-02-01 | Standard Telephones Cables Ltd | Improvements in or relating to semiconductor devices | 
| US3589081A (en) * | 1967-08-21 | 1971-06-29 | Pennwalt Corp | Abrading method | 
| GB1226880A (enEXAMPLES) * | 1968-03-21 | 1971-03-31 | ||
| CH504783A (de) * | 1969-06-20 | 1971-03-15 | Siemens Ag | Verfahren zum Abtrennen eines Körpers von einem scheibenförmigen Kristall und Vorrichtung zur Durchführung dieses Verfahrens | 
| SE358838B (enEXAMPLES) * | 1971-12-01 | 1973-08-13 | Ingenjoers Fa Hebe Ab | 
- 
        1973
        
- 1973-10-11 CH CH1450973A patent/CH566643A5/xx not_active IP Right Cessation
 - 1973-11-02 DE DE19737339254U patent/DE7339254U/de not_active Expired
 - 1973-11-02 DE DE2354854A patent/DE2354854C2/de not_active Expired
 
 - 
        1974
        
- 1974-10-07 JP JP11544074A patent/JPS5611225B2/ja not_active Expired
 - 1974-10-09 GB GB4368574A patent/GB1460645A/en not_active Expired
 - 1974-10-11 US US05/514,251 patent/US3953941A/en not_active Expired - Lifetime
 
 
Also Published As
| Publication number | Publication date | 
|---|---|
| US3953941A (en) | 1976-05-04 | 
| GB1460645A (en) | 1977-01-06 | 
| CH566643A5 (enEXAMPLES) | 1975-09-15 | 
| DE7339254U (de) | 1976-01-08 | 
| DE2354854C2 (de) | 1985-10-24 | 
| JPS5067592A (enEXAMPLES) | 1975-06-06 | 
| DE2354854A1 (de) | 1975-04-30 |