JPS56110041A - Method and device for detecting defect on surface of body - Google Patents

Method and device for detecting defect on surface of body

Info

Publication number
JPS56110041A
JPS56110041A JP1289680A JP1289680A JPS56110041A JP S56110041 A JPS56110041 A JP S56110041A JP 1289680 A JP1289680 A JP 1289680A JP 1289680 A JP1289680 A JP 1289680A JP S56110041 A JPS56110041 A JP S56110041A
Authority
JP
Japan
Prior art keywords
reflected ray
detector
operation unit
inspected
defects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1289680A
Other languages
Japanese (ja)
Inventor
Yoshinobu Kashiuchi
Michitomo Iiyama
Tsutomu Muramoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP1289680A priority Critical patent/JPS56110041A/en
Publication of JPS56110041A publication Critical patent/JPS56110041A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To detect precisely defects on the surface of a body to be inspected by comparing a normally reflected ray from the surface of the body to be inspected with an irregularly reflected ray therefrom. CONSTITUTION:A detector 7 is provided at a position through which the normally reflected ray 4 reflected from the surface of the body 1 to be inspected passes, while irregularly reflected ray detectors 8 and 8' are provided adjacently to the detector 7. The detector 7 connected to an operation unit 9, while the detectors 8 and 8' are connected with each other and then to the operation unit 9. The operation unit 9 operates the ratio of a voltage V1 corresponding to the normal reflected ray to a voltage V2 corresponding to the irregularly reflected ray, discriminates the presence or absence of defects on the basis of a fixed ratio as a reference, and outputs the result of the discrimination.
JP1289680A 1980-02-04 1980-02-04 Method and device for detecting defect on surface of body Pending JPS56110041A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1289680A JPS56110041A (en) 1980-02-04 1980-02-04 Method and device for detecting defect on surface of body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1289680A JPS56110041A (en) 1980-02-04 1980-02-04 Method and device for detecting defect on surface of body

Publications (1)

Publication Number Publication Date
JPS56110041A true JPS56110041A (en) 1981-09-01

Family

ID=11818146

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1289680A Pending JPS56110041A (en) 1980-02-04 1980-02-04 Method and device for detecting defect on surface of body

Country Status (1)

Country Link
JP (1) JPS56110041A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008191104A (en) * 2007-02-07 2008-08-21 Musashino Kiki Kk High liquid level alarm

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008191104A (en) * 2007-02-07 2008-08-21 Musashino Kiki Kk High liquid level alarm

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