JPS56103513A - Trimming method of saw device - Google Patents

Trimming method of saw device

Info

Publication number
JPS56103513A
JPS56103513A JP778681A JP778681A JPS56103513A JP S56103513 A JPS56103513 A JP S56103513A JP 778681 A JP778681 A JP 778681A JP 778681 A JP778681 A JP 778681A JP S56103513 A JPS56103513 A JP S56103513A
Authority
JP
Japan
Prior art keywords
electrode
substrate
given
etching
saw device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP778681A
Other languages
English (en)
Japanese (ja)
Inventor
Sutanree Kurosu Piitaa
Robaato Sureibu Uiriamu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hewlett Packard Japan Inc
Original Assignee
Yokogawa Hewlett Packard Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hewlett Packard Ltd filed Critical Yokogawa Hewlett Packard Ltd
Publication of JPS56103513A publication Critical patent/JPS56103513A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H03H3/10—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves for obtaining desired frequency or temperature coefficient

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP778681A 1980-01-21 1981-01-21 Trimming method of saw device Pending JPS56103513A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/113,832 US4278492A (en) 1980-01-21 1980-01-21 Frequency trimming of surface acoustic wave devices

Publications (1)

Publication Number Publication Date
JPS56103513A true JPS56103513A (en) 1981-08-18

Family

ID=22351767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP778681A Pending JPS56103513A (en) 1980-01-21 1981-01-21 Trimming method of saw device

Country Status (5)

Country Link
US (1) US4278492A (de)
JP (1) JPS56103513A (de)
DE (1) DE3043156A1 (de)
FR (1) FR2474256A1 (de)
GB (1) GB2069277B (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4364016A (en) * 1980-11-03 1982-12-14 Sperry Corporation Method for post fabrication frequency trimming of surface acoustic wave devices
US4414243A (en) * 1982-07-06 1983-11-08 General Electric Company Method for making surface acoustic wave devices
FR2551861B1 (fr) * 1983-09-09 1985-10-18 Thomson Csf Procede de mesure de la profondeur d'une gravure ionique
US4595853A (en) * 1983-11-17 1986-06-17 Hitachi, Ltd. Apparatus for and method of determining properties of saw substrates
US4764244A (en) * 1985-06-11 1988-08-16 The Foxboro Company Resonant sensor and method of making same
US4672254A (en) * 1985-10-11 1987-06-09 Massachusetts Institute Of Technology Surface acoustic wave devices and method of manufacture thereof
GB2203590B (en) * 1987-04-02 1991-02-06 Stc Plc Resonator manufacture
US4836882A (en) * 1988-09-12 1989-06-06 The United States Of America As Represented By The Secretary Of The Army Method of making an acceleration hardened resonator
US4890369A (en) * 1988-10-28 1990-01-02 United Technologies Corporation Method of manufacturing saw devices
US5111168A (en) * 1990-08-15 1992-05-05 Texas Instruments Incorporated Real-time, in-situ saw filter delay adjustment
JP3244386B2 (ja) * 1994-08-23 2002-01-07 松下電器産業株式会社 弾性表面波装置
US5630949A (en) * 1995-06-01 1997-05-20 Tfr Technologies, Inc. Method and apparatus for fabricating a piezoelectric resonator to a resonant frequency
US6273991B1 (en) * 1999-07-28 2001-08-14 Saunders & Associates, Inc. Apparatus for plasma ion trimming of frequency devices
EP1381156A4 (de) * 2001-04-19 2004-09-08 Matsushita Electric Ind Co Ltd Oberflächenwellenbauelement und verfahren zu seiner herstellung und elektronisches bauelement damit
JP5078873B2 (ja) * 2005-04-06 2012-11-21 バイオスケール・インコーポレーテッド 電気的応答デバイス
US9164051B2 (en) 2005-04-06 2015-10-20 Bioscale, Inc. Electrically responsive device
WO2007127107A2 (en) * 2006-04-21 2007-11-08 Bioscale, Inc. Microfabricated devices and method for fabricating microfabricated devices
US8689426B2 (en) 2008-12-17 2014-04-08 Sand 9, Inc. Method of manufacturing a resonating structure
WO2011109382A1 (en) 2010-03-01 2011-09-09 Sand9, Inc. Microelectromechanical gyroscopes and related apparatus and methods
US8833161B2 (en) 2010-04-20 2014-09-16 Sand 9, Inc. Microelectromechanical gyroscopes and related apparatus and methods
WO2012040043A1 (en) 2010-09-20 2012-03-29 Sand9, Inc. Resonant sensing using extensional modes of a plate
US9383208B2 (en) 2011-10-13 2016-07-05 Analog Devices, Inc. Electromechanical magnetometer and applications thereof

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3971684A (en) * 1973-12-03 1976-07-27 Hewlett-Packard Company Etching thin film circuits and semiconductor chips
GB1529941A (en) * 1975-01-15 1978-10-25 Mullard Ltd Electrical filters including coupled resonators
FR2343331A1 (fr) * 1976-03-05 1977-09-30 Thomson Csf Procede de controle d'usinage par bombardement ionique, d'une plaquette piezo-electrique
US4144507A (en) * 1976-09-29 1979-03-13 Texas Instruments Incorporated Surface acoustic wave resonator incorporating coupling transducer into reflecting arrays
US4176004A (en) * 1978-08-21 1979-11-27 Westinghouse Electric Corp. Method for modifying the characteristics of a semiconductor fusions

Also Published As

Publication number Publication date
DE3043156A1 (de) 1981-07-23
GB2069277B (en) 1984-05-10
FR2474256A1 (fr) 1981-07-24
FR2474256B1 (de) 1985-03-29
GB2069277A (en) 1981-08-19
US4278492A (en) 1981-07-14

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