JPS5598707A - Forming method of glass thick film light circuit - Google Patents

Forming method of glass thick film light circuit

Info

Publication number
JPS5598707A
JPS5598707A JP487579A JP487579A JPS5598707A JP S5598707 A JPS5598707 A JP S5598707A JP 487579 A JP487579 A JP 487579A JP 487579 A JP487579 A JP 487579A JP S5598707 A JPS5598707 A JP S5598707A
Authority
JP
Japan
Prior art keywords
layer
oxides
glass
vapor deposition
thick film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP487579A
Other languages
Japanese (ja)
Inventor
Ichiro Saito
Yasuaki Tamura
Tadashi Tokimoto
Junji Izawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumco Techxiv Corp
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Komatsu Electronic Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd, Komatsu Electronic Metals Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP487579A priority Critical patent/JPS5598707A/en
Publication of JPS5598707A publication Critical patent/JPS5598707A/en
Pending legal-status Critical Current

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  • Optical Integrated Circuits (AREA)

Abstract

PURPOSE:To form the captioned circuit of good sectional shape with good accuracy by applying the mask of light circuit shape on the glass thick film layer of a desired refractive index containing modification oxides and ion exchanging the modification oxides in molten electrolytic salt bath then performing chemical etching. CONSTITUTION:The glass fine powder layer 2 composed primarily of SiO2 containing madification oxides Na2O, Al2O3, TiO2 giving a refractive index larger than that of a mirror-surface-polished quarty glass substrate 1 is deposited on the substrate 1 and is then melted to form a glass thick film layer 3. Next, a vapor deposition film 4 of Al, Au, Fe or the like is formed to desired light circuit shape by a known method. Thereafter this is dipped in the salt bath containing Li2SO4 to ion exchange Li2O and modification oxides. However, the layer 3 under the vapor deposition film 4 does not undergo ion exchanging. Next, the layer 3 of the portions other than the patterned portions is etched off by HF or HF + HCl, or the like. The vapor deposition film 4 on the layer 3 remained after the etch-off is removed.
JP487579A 1979-01-22 1979-01-22 Forming method of glass thick film light circuit Pending JPS5598707A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP487579A JPS5598707A (en) 1979-01-22 1979-01-22 Forming method of glass thick film light circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP487579A JPS5598707A (en) 1979-01-22 1979-01-22 Forming method of glass thick film light circuit

Publications (1)

Publication Number Publication Date
JPS5598707A true JPS5598707A (en) 1980-07-28

Family

ID=11595836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP487579A Pending JPS5598707A (en) 1979-01-22 1979-01-22 Forming method of glass thick film light circuit

Country Status (1)

Country Link
JP (1) JPS5598707A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5746212A (en) * 1980-09-05 1982-03-16 Nippon Telegr & Teleph Corp <Ntt> Glass waveguide for optical circuit
JPS57202506A (en) * 1981-06-06 1982-12-11 Nippon Sheet Glass Co Ltd Optical circuit and its production

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5746212A (en) * 1980-09-05 1982-03-16 Nippon Telegr & Teleph Corp <Ntt> Glass waveguide for optical circuit
JPS57202506A (en) * 1981-06-06 1982-12-11 Nippon Sheet Glass Co Ltd Optical circuit and its production

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