JPS6451347A - Production of multilayered film of metal oxide - Google Patents

Production of multilayered film of metal oxide

Info

Publication number
JPS6451347A
JPS6451347A JP20808187A JP20808187A JPS6451347A JP S6451347 A JPS6451347 A JP S6451347A JP 20808187 A JP20808187 A JP 20808187A JP 20808187 A JP20808187 A JP 20808187A JP S6451347 A JPS6451347 A JP S6451347A
Authority
JP
Japan
Prior art keywords
layer
soln
sio2
oxide
multilayered film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20808187A
Other languages
Japanese (ja)
Inventor
Soichiro Horikoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Iwasaki Denki KK
Original Assignee
Iwasaki Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Iwasaki Denki KK filed Critical Iwasaki Denki KK
Priority to JP20808187A priority Critical patent/JPS6451347A/en
Publication of JPS6451347A publication Critical patent/JPS6451347A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To prevent exfoliation of a multilayered film due to continuous or intermittent thermal shock by forming a layer consisting of at least one kind of oxide among SiO2, Al2O3, oxide of P and B on the surface of a glass substrate before the formation of an oxide multilayered film. CONSTITUTION:For example, an infrared rays reflecting film 2 is formed on the surface of a tube or bulb 1 consisting of transparent quartz glass of a tungsten halogen lamp by a dipping calcination method using an organometallic compd. soln. for this purpose, a soln. of alkoxy silane in alcohol and a soln. of titanium alkoxide in alcohol are prepd. wherein each solute is polymerized to some degree, forming an SiO2 coating soln. and TiO2 coating soln., and a P compd. is incorporated into the SiO2 coating soln. In the first stage, an oxide layer 3 contg. P-contg. SiO2 is formed on a bulb 1 with said SiO2 on the surface after cleaning the surface, then a layer 21 of a highly refractive substance consisting of TiO2 as the first layer of a multilayered film is formed with the TiO2 soln. Also, a layer 22 of a low refractive substance consisting of P-contg.-SiO2 is formed similarly as the layer 3, and the layer 21 and the layer 22 are formed alternately to obtain thus a film 2.
JP20808187A 1987-08-24 1987-08-24 Production of multilayered film of metal oxide Pending JPS6451347A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20808187A JPS6451347A (en) 1987-08-24 1987-08-24 Production of multilayered film of metal oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20808187A JPS6451347A (en) 1987-08-24 1987-08-24 Production of multilayered film of metal oxide

Publications (1)

Publication Number Publication Date
JPS6451347A true JPS6451347A (en) 1989-02-27

Family

ID=16550326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20808187A Pending JPS6451347A (en) 1987-08-24 1987-08-24 Production of multilayered film of metal oxide

Country Status (1)

Country Link
JP (1) JPS6451347A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0855604A1 (en) * 1997-01-23 1998-07-29 Nikon Corporation Multilayer antireflection coatings for grazing ultraviolet incident light
US6671109B2 (en) 2001-07-27 2003-12-30 Nidec Copal Corporation ND filter having composite PVD film of metal and its oxide
KR20040022564A (en) * 2002-09-09 2004-03-16 (주) 유니플라텍 Manufacturing for coating materials

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58137809A (en) * 1982-02-10 1983-08-16 Fujitsu Ltd High stability optical filter of multilayered dielectric film
JPS58221811A (en) * 1982-06-17 1983-12-23 Fuji Photo Optical Co Ltd Heat-resistant antireflection film
JPS60130049A (en) * 1983-12-16 1985-07-11 東芝ライテック株式会社 Bulb
JPS61101949A (en) * 1984-10-24 1986-05-20 東芝ライテック株式会社 Bulb

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58137809A (en) * 1982-02-10 1983-08-16 Fujitsu Ltd High stability optical filter of multilayered dielectric film
JPS58221811A (en) * 1982-06-17 1983-12-23 Fuji Photo Optical Co Ltd Heat-resistant antireflection film
JPS60130049A (en) * 1983-12-16 1985-07-11 東芝ライテック株式会社 Bulb
JPS61101949A (en) * 1984-10-24 1986-05-20 東芝ライテック株式会社 Bulb

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0855604A1 (en) * 1997-01-23 1998-07-29 Nikon Corporation Multilayer antireflection coatings for grazing ultraviolet incident light
US6030717A (en) * 1997-01-23 2000-02-29 Nikon Corporation Multilayer antireflection coatings for grazing ultraviolet incident light
US6671109B2 (en) 2001-07-27 2003-12-30 Nidec Copal Corporation ND filter having composite PVD film of metal and its oxide
KR20040022564A (en) * 2002-09-09 2004-03-16 (주) 유니플라텍 Manufacturing for coating materials

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