JPS6486440A - Lamp for ultraviolet illuminant - Google Patents

Lamp for ultraviolet illuminant

Info

Publication number
JPS6486440A
JPS6486440A JP24480687A JP24480687A JPS6486440A JP S6486440 A JPS6486440 A JP S6486440A JP 24480687 A JP24480687 A JP 24480687A JP 24480687 A JP24480687 A JP 24480687A JP S6486440 A JPS6486440 A JP S6486440A
Authority
JP
Japan
Prior art keywords
lamp tube
sio2
lamp
film
ultraviolet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24480687A
Other languages
Japanese (ja)
Inventor
Shigenori Hayashi
Takashi Inushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP24480687A priority Critical patent/JPS6486440A/en
Publication of JPS6486440A publication Critical patent/JPS6486440A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To improve reliability in a lamp for hours as well as to make the light intensity of a wavelength of 185nm in particular so as not to be lowered even by a secular change by applying coating treatment to the inner wall of a ultraviolet luminous bulb. CONSTITUTION:Silane gas and oxide gas are made to flow to the inner side of a luminous lamp tube 1 at the specified flow ratio, irradiating an ultraviolet illuminant containing a wavelength of 185nm from the outside of the lamp tube 1, whereby a photochemical reaction is caused and an inner surface of the lamp tube 1 is coated with SiO2 thin film. At this time, simultaneously this lamp tube is heated, and when temperature is set to 250 deg.C-450 deg.C or so and the SiO2 thin film 4 is formed there, this SiO2 film is able to form a yet finer hard film. With this formation, a recess 2 so far formed in the inner surface of the lamp tube 1 is filled up by the SiO2 film 4, so that it will come to such a state that mercury cannot be stuck to the recess 2.
JP24480687A 1987-09-29 1987-09-29 Lamp for ultraviolet illuminant Pending JPS6486440A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24480687A JPS6486440A (en) 1987-09-29 1987-09-29 Lamp for ultraviolet illuminant

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24480687A JPS6486440A (en) 1987-09-29 1987-09-29 Lamp for ultraviolet illuminant

Publications (1)

Publication Number Publication Date
JPS6486440A true JPS6486440A (en) 1989-03-31

Family

ID=17124219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24480687A Pending JPS6486440A (en) 1987-09-29 1987-09-29 Lamp for ultraviolet illuminant

Country Status (1)

Country Link
JP (1) JPS6486440A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6924495B1 (en) 2004-02-13 2005-08-02 James Lawrence Brickley Heat controlled ultraviolet light apparatus and methods of sanitizing objects using said apparatus
JP2008524785A (en) * 2004-12-17 2008-07-10 ショット アクチエンゲゼルシャフト Inner coating of lamp vessel such as discharge vessel of gas discharge lamp

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5148583A (en) * 1974-10-23 1976-04-26 Hitachi Ltd KINZOKUJOKIHODENTO
JPS5337574U (en) * 1976-09-06 1978-04-01
JPS6220236A (en) * 1985-07-19 1987-01-28 Hitachi Ltd Bulb-type fluorescent lamp

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5148583A (en) * 1974-10-23 1976-04-26 Hitachi Ltd KINZOKUJOKIHODENTO
JPS5337574U (en) * 1976-09-06 1978-04-01
JPS6220236A (en) * 1985-07-19 1987-01-28 Hitachi Ltd Bulb-type fluorescent lamp

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6924495B1 (en) 2004-02-13 2005-08-02 James Lawrence Brickley Heat controlled ultraviolet light apparatus and methods of sanitizing objects using said apparatus
JP2008524785A (en) * 2004-12-17 2008-07-10 ショット アクチエンゲゼルシャフト Inner coating of lamp vessel such as discharge vessel of gas discharge lamp

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