JPS57202506A - Optical circuit and its production - Google Patents

Optical circuit and its production

Info

Publication number
JPS57202506A
JPS57202506A JP8737081A JP8737081A JPS57202506A JP S57202506 A JPS57202506 A JP S57202506A JP 8737081 A JP8737081 A JP 8737081A JP 8737081 A JP8737081 A JP 8737081A JP S57202506 A JPS57202506 A JP S57202506A
Authority
JP
Japan
Prior art keywords
waveguides
sio2
optical fibers
silicon substrate
high accuracy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8737081A
Other languages
Japanese (ja)
Inventor
Tetsuya Yamazaki
Eiji Okuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sheet Glass Co Ltd
Original Assignee
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd
Priority to JP8737081A priority Critical patent/JPS57202506A/en
Publication of JPS57202506A publication Critical patent/JPS57202506A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Mechanical Coupling Of Light Guides (AREA)

Abstract

PURPOSE:To facilitate connection to optical fibers with high accuracy by forming optical waveguides of prescribed patterns on a silicon substrate and grooves for holding optical fibers on the common lines thereof. CONSTITUTION:An SiO2 film 2 as a clad layer is formed on the (100) plane of a silicon substrate 1, and a vitreous layer 3 of the composition GeO2-P2O5-TiO2- SiO2 is deposited thereon by a plasma CVD method. The core glass 3 is patterned by a plasma etching method and a surface clad layer 5 is provided therein by a plasma CVD method, whereby waveguides 7 are formed. Photoresist is coated over the entire surace and is exposed to UV rays by using a mask having prescribed patterns, after which the resist is developed. The exposed parts of the SiO2 are etched by a buffer hydrofluoric acid to remove the photoresist film, and V-shaped grooves 6 are formed by anisotropic etching using an aq. 30% KOH soln. In this way, the connection of optical fibers 8 and the waveguides 7 with high accuracy is facilitated by this.
JP8737081A 1981-06-06 1981-06-06 Optical circuit and its production Pending JPS57202506A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8737081A JPS57202506A (en) 1981-06-06 1981-06-06 Optical circuit and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8737081A JPS57202506A (en) 1981-06-06 1981-06-06 Optical circuit and its production

Publications (1)

Publication Number Publication Date
JPS57202506A true JPS57202506A (en) 1982-12-11

Family

ID=13913004

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8737081A Pending JPS57202506A (en) 1981-06-06 1981-06-06 Optical circuit and its production

Country Status (1)

Country Link
JP (1) JPS57202506A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0171615A2 (en) * 1984-08-10 1986-02-19 Nippon Telegraph and Telephone Corporation Hybrid optical integrated circuit and fabrication method thereof
JPS61284704A (en) * 1985-06-11 1986-12-15 Sumitomo Electric Ind Ltd Multi-layered glass film for quartz optical waveguide and its production
JPS62124511A (en) * 1985-11-25 1987-06-05 Nippon Telegr & Teleph Corp <Ntt> Preparation of silicon wafer having optical waveguide film
JPS62288802A (en) * 1986-06-09 1987-12-15 Nippon Telegr & Teleph Corp <Ntt> Manufacture of quartz optical waveguide
JPH01229207A (en) * 1988-03-03 1989-09-12 American Teleph & Telegr Co <Att> Optical fiber connector and manufacture thereof
JPH01291204A (en) * 1988-05-18 1989-11-22 Furukawa Electric Co Ltd:The Method of connecting waveguide
JPH0271203A (en) * 1988-03-03 1990-03-09 American Teleph & Telegr Co <Att> Device having optical guide body supported by substrate

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5598707A (en) * 1979-01-22 1980-07-28 Oki Electric Ind Co Ltd Forming method of glass thick film light circuit
JPS5642204A (en) * 1979-09-14 1981-04-20 Fujitsu Ltd Production of photocircuit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5598707A (en) * 1979-01-22 1980-07-28 Oki Electric Ind Co Ltd Forming method of glass thick film light circuit
JPS5642204A (en) * 1979-09-14 1981-04-20 Fujitsu Ltd Production of photocircuit

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0171615A2 (en) * 1984-08-10 1986-02-19 Nippon Telegraph and Telephone Corporation Hybrid optical integrated circuit and fabrication method thereof
JPS61284704A (en) * 1985-06-11 1986-12-15 Sumitomo Electric Ind Ltd Multi-layered glass film for quartz optical waveguide and its production
JPS62124511A (en) * 1985-11-25 1987-06-05 Nippon Telegr & Teleph Corp <Ntt> Preparation of silicon wafer having optical waveguide film
JPS62288802A (en) * 1986-06-09 1987-12-15 Nippon Telegr & Teleph Corp <Ntt> Manufacture of quartz optical waveguide
JPH01229207A (en) * 1988-03-03 1989-09-12 American Teleph & Telegr Co <Att> Optical fiber connector and manufacture thereof
JPH0271203A (en) * 1988-03-03 1990-03-09 American Teleph & Telegr Co <Att> Device having optical guide body supported by substrate
JPH01291204A (en) * 1988-05-18 1989-11-22 Furukawa Electric Co Ltd:The Method of connecting waveguide

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