JPS5595925A - Noise reducing method of optical signal detecting system - Google Patents
Noise reducing method of optical signal detecting systemInfo
- Publication number
- JPS5595925A JPS5595925A JP128779A JP128779A JPS5595925A JP S5595925 A JPS5595925 A JP S5595925A JP 128779 A JP128779 A JP 128779A JP 128779 A JP128779 A JP 128779A JP S5595925 A JPS5595925 A JP S5595925A
- Authority
- JP
- Japan
- Prior art keywords
- diameter
- beam diameter
- scanning plane
- confusion
- necessary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Facsimile Scanning Arrangements (AREA)
- Optical Recording Or Reproduction (AREA)
Abstract
PURPOSE: To reduce the effect of dust and flaws on an optical element by making the beam diameter of the minimum circle of confusion much smaller than the required beam diamemter on scanning plane and making the beam diameter on the scanning plane before or after the position of the minimum circle of confusion nearly equal to the necessary beam diameter.
CONSTITUTION: In order to obtain a necessary beam diameter on the scanning plane, the beam diameter is once widened, thence it is stopped down by a scanning lens 1. If at this time, the focal length of the lens 1 is made constant, the diameter of the maximum circle of confusion of the exit beam becomes smaller as the incident beam diameter is larger. Thereupon, to obtain the necessary beam diameter on the scanning plane 2, such an optical system as the one in which the necessary beam diameter becomes the diameter of the minimum circle of confusion like a beam 3 and such an optical system as the one in which the diameter of the minimum circle of confusion is much smaller like a beam 4 and the beam diameter becomes equal to the necessary beam diameter on the scanning plane 2 are compared, then the quantity of laser light radiated to dust, flaw 6, etc. on the optical system 5 near the scanning plane 2 becomes much smaller in the beam 4 and therefore the effect of dust, etc. may be considerably reduced by using the optical system of the beam 4.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP128779A JPS5595925A (en) | 1979-01-12 | 1979-01-12 | Noise reducing method of optical signal detecting system |
| US06/109,217 US4330205A (en) | 1979-01-12 | 1980-01-03 | Optical apparatus for measuring the size and location of optical in an article |
| GB8000586A GB2044921B (en) | 1979-01-12 | 1980-01-08 | Optical apparatus for inspecting defects |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP128779A JPS5595925A (en) | 1979-01-12 | 1979-01-12 | Noise reducing method of optical signal detecting system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5595925A true JPS5595925A (en) | 1980-07-21 |
| JPS6217203B2 JPS6217203B2 (en) | 1987-04-16 |
Family
ID=11497229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP128779A Granted JPS5595925A (en) | 1979-01-12 | 1979-01-12 | Noise reducing method of optical signal detecting system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5595925A (en) |
-
1979
- 1979-01-12 JP JP128779A patent/JPS5595925A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6217203B2 (en) | 1987-04-16 |
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