JPS5595807A - Thickness measuring method for transparent plate - Google Patents

Thickness measuring method for transparent plate

Info

Publication number
JPS5595807A
JPS5595807A JP234179A JP234179A JPS5595807A JP S5595807 A JPS5595807 A JP S5595807A JP 234179 A JP234179 A JP 234179A JP 234179 A JP234179 A JP 234179A JP S5595807 A JPS5595807 A JP S5595807A
Authority
JP
Japan
Prior art keywords
plate
shift
ccd9
laser
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP234179A
Other languages
Japanese (ja)
Other versions
JPH0140288B2 (en
Inventor
Katsumi Kokubu
Masaharu Okafuji
Michiaki Okada
Masaaki Nurishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sheet Glass Co Ltd
Original Assignee
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd
Priority to JP234179A priority Critical patent/JPS5595807A/en
Publication of JPS5595807A publication Critical patent/JPS5595807A/en
Publication of JPH0140288B2 publication Critical patent/JPH0140288B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To avoid the beam shift and then secure the high-accuracy detection for the change of the plate thickness by aging, by setting the radius at the spot of the laser beam which is stopped down most as the fixed length in case the change of thickness of the transparent plate is measured via the laser beat pattern.
CONSTITUTION: Beam 6 sent from light source 5 is projected onto the measured plate 1 after being stopped down via lens 7, and beam 6 reflected on plate 1 is received by photoelectric conversion element array (CCD) 9. Light source 5, lens 7 and CCD9 are distributed so that the curvature center of the light wave entering the CCD may feature the same distance as the perpendicular lowered down to plate 1 from the standard position of CCD9 and from the foot of the perpendicular. At the same time, beam radius r0 is set to the value obtained through the arithmetic formula shown in the diagram so that no beam shift may be caused even with maximum swing angle Wmax of the plate in case the wavelength of the using laser is set to λ0. Output 11 of CCD9 undergoes the rectangular wave conversion via amplifier 12, and thus the shift direction and shift amount of the beat pattern, i.e., the thickness change amount is detected to be displayed at display part 18.
COPYRIGHT: (C)1980,JPO&Japio
JP234179A 1979-01-13 1979-01-13 Thickness measuring method for transparent plate Granted JPS5595807A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP234179A JPS5595807A (en) 1979-01-13 1979-01-13 Thickness measuring method for transparent plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP234179A JPS5595807A (en) 1979-01-13 1979-01-13 Thickness measuring method for transparent plate

Publications (2)

Publication Number Publication Date
JPS5595807A true JPS5595807A (en) 1980-07-21
JPH0140288B2 JPH0140288B2 (en) 1989-08-28

Family

ID=11526583

Family Applications (1)

Application Number Title Priority Date Filing Date
JP234179A Granted JPS5595807A (en) 1979-01-13 1979-01-13 Thickness measuring method for transparent plate

Country Status (1)

Country Link
JP (1) JPS5595807A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103217120A (en) * 2013-03-22 2013-07-24 浙江理工大学 Laser thickness-measuring method and device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103217120A (en) * 2013-03-22 2013-07-24 浙江理工大学 Laser thickness-measuring method and device

Also Published As

Publication number Publication date
JPH0140288B2 (en) 1989-08-28

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