JPS5595807A - Thickness measuring method for transparent plate - Google Patents
Thickness measuring method for transparent plateInfo
- Publication number
- JPS5595807A JPS5595807A JP234179A JP234179A JPS5595807A JP S5595807 A JPS5595807 A JP S5595807A JP 234179 A JP234179 A JP 234179A JP 234179 A JP234179 A JP 234179A JP S5595807 A JPS5595807 A JP S5595807A
- Authority
- JP
- Japan
- Prior art keywords
- plate
- shift
- ccd9
- laser
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE: To avoid the beam shift and then secure the high-accuracy detection for the change of the plate thickness by aging, by setting the radius at the spot of the laser beam which is stopped down most as the fixed length in case the change of thickness of the transparent plate is measured via the laser beat pattern.
CONSTITUTION: Beam 6 sent from light source 5 is projected onto the measured plate 1 after being stopped down via lens 7, and beam 6 reflected on plate 1 is received by photoelectric conversion element array (CCD) 9. Light source 5, lens 7 and CCD9 are distributed so that the curvature center of the light wave entering the CCD may feature the same distance as the perpendicular lowered down to plate 1 from the standard position of CCD9 and from the foot of the perpendicular. At the same time, beam radius r0 is set to the value obtained through the arithmetic formula shown in the diagram so that no beam shift may be caused even with maximum swing angle Wmax of the plate in case the wavelength of the using laser is set to λ0. Output 11 of CCD9 undergoes the rectangular wave conversion via amplifier 12, and thus the shift direction and shift amount of the beat pattern, i.e., the thickness change amount is detected to be displayed at display part 18.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP234179A JPS5595807A (en) | 1979-01-13 | 1979-01-13 | Thickness measuring method for transparent plate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP234179A JPS5595807A (en) | 1979-01-13 | 1979-01-13 | Thickness measuring method for transparent plate |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5595807A true JPS5595807A (en) | 1980-07-21 |
JPH0140288B2 JPH0140288B2 (en) | 1989-08-28 |
Family
ID=11526583
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP234179A Granted JPS5595807A (en) | 1979-01-13 | 1979-01-13 | Thickness measuring method for transparent plate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5595807A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103217120A (en) * | 2013-03-22 | 2013-07-24 | 浙江理工大学 | Laser thickness-measuring method and device |
-
1979
- 1979-01-13 JP JP234179A patent/JPS5595807A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103217120A (en) * | 2013-03-22 | 2013-07-24 | 浙江理工大学 | Laser thickness-measuring method and device |
Also Published As
Publication number | Publication date |
---|---|
JPH0140288B2 (en) | 1989-08-28 |
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