JPS5595323A - Manufacturing method of semiconductor device - Google Patents

Manufacturing method of semiconductor device

Info

Publication number
JPS5595323A
JPS5595323A JP317379A JP317379A JPS5595323A JP S5595323 A JPS5595323 A JP S5595323A JP 317379 A JP317379 A JP 317379A JP 317379 A JP317379 A JP 317379A JP S5595323 A JPS5595323 A JP S5595323A
Authority
JP
Japan
Prior art keywords
developed
abnormal
film
sputtering
alloys
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP317379A
Other languages
English (en)
Inventor
Kazuaki Miyata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP317379A priority Critical patent/JPS5595323A/ja
Publication of JPS5595323A publication Critical patent/JPS5595323A/ja
Pending legal-status Critical Current

Links

JP317379A 1979-01-12 1979-01-12 Manufacturing method of semiconductor device Pending JPS5595323A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP317379A JPS5595323A (en) 1979-01-12 1979-01-12 Manufacturing method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP317379A JPS5595323A (en) 1979-01-12 1979-01-12 Manufacturing method of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5595323A true JPS5595323A (en) 1980-07-19

Family

ID=11549980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP317379A Pending JPS5595323A (en) 1979-01-12 1979-01-12 Manufacturing method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5595323A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58176932A (ja) * 1982-04-09 1983-10-17 Nissan Motor Co Ltd 縦型半導体素子の製造方法
JPS59225520A (ja) * 1983-06-03 1984-12-18 Sumitomo Electric Ind Ltd 半導体装置の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58176932A (ja) * 1982-04-09 1983-10-17 Nissan Motor Co Ltd 縦型半導体素子の製造方法
JPS59225520A (ja) * 1983-06-03 1984-12-18 Sumitomo Electric Ind Ltd 半導体装置の製造方法
JPH0554256B2 (ja) * 1983-06-03 1993-08-12 Sumitomo Electric Industries

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