JPS5593520A - Production of core of magnetic head - Google Patents

Abstract

PURPOSE:To produce a magnetic head core of a narrow track width with a high dimension precision by performing processes such as evaporation of a magnetic material and selective etching after providing partitions, whose interval is regulated to the core width, on a substrate. CONSTITUTION:Partitions 9 whose interval (inside dimension) l is made equal to the core width are formed on substrate 1, which is provided with insulating layer 2, by a resistor pattern for evaporation (figure b). Next, resistor coating evaporation is performed to cause a magnetic material (for example, permalloy) to adhere onto all the surface of substrate 1, and the first material film 3 for core (between partitions 9), the second material film 10 (on partitions 9) and the third material film 11 (outside partitions 9) are formed (figure c), and next, the upper face and the side face of the first material film 3 are covered with resistor pattern 12 for etching (figures d and e) after removing partitions 9 together with the second material film 10. Next, after removing the third material film 11 by etching, resistor pattern 12 is removed to expose the first material film 3, thereby obtaining a core (figures f and g).