JPS5591125A - Pattern formation method and apparatus using charged particle beam - Google Patents
Pattern formation method and apparatus using charged particle beamInfo
- Publication number
- JPS5591125A JPS5591125A JP16113978A JP16113978A JPS5591125A JP S5591125 A JPS5591125 A JP S5591125A JP 16113978 A JP16113978 A JP 16113978A JP 16113978 A JP16113978 A JP 16113978A JP S5591125 A JPS5591125 A JP S5591125A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- time
- charged particle
- max
- particle beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16113978A JPS5591125A (en) | 1978-12-28 | 1978-12-28 | Pattern formation method and apparatus using charged particle beam |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16113978A JPS5591125A (en) | 1978-12-28 | 1978-12-28 | Pattern formation method and apparatus using charged particle beam |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5591125A true JPS5591125A (en) | 1980-07-10 |
JPS5759657B2 JPS5759657B2 (ja) | 1982-12-15 |
Family
ID=15729325
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16113978A Granted JPS5591125A (en) | 1978-12-28 | 1978-12-28 | Pattern formation method and apparatus using charged particle beam |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5591125A (ja) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5251871A (en) * | 1975-10-23 | 1977-04-26 | Rikagaku Kenkyusho | Projecting method for charge particle beams |
-
1978
- 1978-12-28 JP JP16113978A patent/JPS5591125A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5251871A (en) * | 1975-10-23 | 1977-04-26 | Rikagaku Kenkyusho | Projecting method for charge particle beams |
Also Published As
Publication number | Publication date |
---|---|
JPS5759657B2 (ja) | 1982-12-15 |
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