JPS5590405A - Forming device for wet oxygen and heat treatment furnace provided with the said device - Google Patents

Forming device for wet oxygen and heat treatment furnace provided with the said device

Info

Publication number
JPS5590405A
JPS5590405A JP15986078A JP15986078A JPS5590405A JP S5590405 A JPS5590405 A JP S5590405A JP 15986078 A JP15986078 A JP 15986078A JP 15986078 A JP15986078 A JP 15986078A JP S5590405 A JPS5590405 A JP S5590405A
Authority
JP
Japan
Prior art keywords
oxygen
hydrogen
vessel
pipe
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15986078A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6360528B2 (enrdf_load_stackoverflow
Inventor
Tamotsu Sasaki
Masamoto Akeyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15986078A priority Critical patent/JPS5590405A/ja
Publication of JPS5590405A publication Critical patent/JPS5590405A/ja
Publication of JPS6360528B2 publication Critical patent/JPS6360528B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Oxygen, Ozone, And Oxides In General (AREA)
JP15986078A 1978-12-27 1978-12-27 Forming device for wet oxygen and heat treatment furnace provided with the said device Granted JPS5590405A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15986078A JPS5590405A (en) 1978-12-27 1978-12-27 Forming device for wet oxygen and heat treatment furnace provided with the said device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15986078A JPS5590405A (en) 1978-12-27 1978-12-27 Forming device for wet oxygen and heat treatment furnace provided with the said device

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP10458284A Division JPS60131807A (ja) 1984-05-25 1984-05-25 ウエツト酸素雰囲気生成装置
JP10458184A Division JPS60122799A (ja) 1984-05-25 1984-05-25 半導体ウエハの熱処理方法

Publications (2)

Publication Number Publication Date
JPS5590405A true JPS5590405A (en) 1980-07-09
JPS6360528B2 JPS6360528B2 (enrdf_load_stackoverflow) 1988-11-24

Family

ID=15702797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15986078A Granted JPS5590405A (en) 1978-12-27 1978-12-27 Forming device for wet oxygen and heat treatment furnace provided with the said device

Country Status (1)

Country Link
JP (1) JPS5590405A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856435U (ja) * 1981-10-12 1983-04-16 沖電気工業株式会社 半導体ウエハの熱処理装置
JPS5895633U (ja) * 1981-12-23 1983-06-29 クラリオン株式会社 水素燃焼プロセスチユ−ブ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53123667A (en) * 1977-04-04 1978-10-28 Mitsubishi Electric Corp Generator for semiconuctor oxidized film

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53123667A (en) * 1977-04-04 1978-10-28 Mitsubishi Electric Corp Generator for semiconuctor oxidized film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856435U (ja) * 1981-10-12 1983-04-16 沖電気工業株式会社 半導体ウエハの熱処理装置
JPS5895633U (ja) * 1981-12-23 1983-06-29 クラリオン株式会社 水素燃焼プロセスチユ−ブ

Also Published As

Publication number Publication date
JPS6360528B2 (enrdf_load_stackoverflow) 1988-11-24

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