JPS5588326A - Inspection device for defect of mask - Google Patents

Inspection device for defect of mask

Info

Publication number
JPS5588326A
JPS5588326A JP15985578A JP15985578A JPS5588326A JP S5588326 A JPS5588326 A JP S5588326A JP 15985578 A JP15985578 A JP 15985578A JP 15985578 A JP15985578 A JP 15985578A JP S5588326 A JPS5588326 A JP S5588326A
Authority
JP
Japan
Prior art keywords
photomask
lamp
stage
mask
main surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15985578A
Other languages
English (en)
Other versions
JPS6130730B2 (ja
Inventor
Moriaki Kurimoto
Tamotsu Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15985578A priority Critical patent/JPS5588326A/ja
Publication of JPS5588326A publication Critical patent/JPS5588326A/ja
Publication of JPS6130730B2 publication Critical patent/JPS6130730B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP15985578A 1978-12-27 1978-12-27 Inspection device for defect of mask Granted JPS5588326A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15985578A JPS5588326A (en) 1978-12-27 1978-12-27 Inspection device for defect of mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15985578A JPS5588326A (en) 1978-12-27 1978-12-27 Inspection device for defect of mask

Publications (2)

Publication Number Publication Date
JPS5588326A true JPS5588326A (en) 1980-07-04
JPS6130730B2 JPS6130730B2 (ja) 1986-07-15

Family

ID=15702694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15985578A Granted JPS5588326A (en) 1978-12-27 1978-12-27 Inspection device for defect of mask

Country Status (1)

Country Link
JP (1) JPS5588326A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111679552A (zh) * 2020-06-28 2020-09-18 无锡中微掩模电子有限公司 一种掩模工艺强光灯罩

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111679552A (zh) * 2020-06-28 2020-09-18 无锡中微掩模电子有限公司 一种掩模工艺强光灯罩

Also Published As

Publication number Publication date
JPS6130730B2 (ja) 1986-07-15

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