JPS57106848A - External appearance test of semiconductor pellet - Google Patents

External appearance test of semiconductor pellet

Info

Publication number
JPS57106848A
JPS57106848A JP18323480A JP18323480A JPS57106848A JP S57106848 A JPS57106848 A JP S57106848A JP 18323480 A JP18323480 A JP 18323480A JP 18323480 A JP18323480 A JP 18323480A JP S57106848 A JPS57106848 A JP S57106848A
Authority
JP
Japan
Prior art keywords
needle
defect
sheet
pellets
lighting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18323480A
Other languages
Japanese (ja)
Inventor
Hiroyuki Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP18323480A priority Critical patent/JPS57106848A/en
Publication of JPS57106848A publication Critical patent/JPS57106848A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8803—Visual inspection

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To simplify the check of positions and to remove pelllets precisely when defects pelleto are pushed off with a needle from semiconductor pellets attached to a sheet by spot lighting the places of defect pellets. CONSTITUTION:Plural semiconductor pellets arranged in line and attached to the back of a transparent or semitransparent sheet 2 are held on a top part of an inner cylinder 7 by putting the sheet 2 between the inner cylinder 7 and outter cylinder 6. A spot light source 10 set up so as to be united with a needle 9 to push off defect pellets from the sheet irradiates near the top of the needle 9. When the needle 9 is brought close to the sheet 2 and the spot light source 10 lightens pellets, the lighting image of a lighting spot is observed through mirrors 4, 5 and the position of the needle 9 is confirmed on the instant. Thus, if the lighting image is observed on the surface image of a defect pellet before the needle 9 pushes off the defect pellet, the defect pellet can be removed precisely.
JP18323480A 1980-12-23 1980-12-23 External appearance test of semiconductor pellet Pending JPS57106848A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18323480A JPS57106848A (en) 1980-12-23 1980-12-23 External appearance test of semiconductor pellet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18323480A JPS57106848A (en) 1980-12-23 1980-12-23 External appearance test of semiconductor pellet

Publications (1)

Publication Number Publication Date
JPS57106848A true JPS57106848A (en) 1982-07-02

Family

ID=16132118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18323480A Pending JPS57106848A (en) 1980-12-23 1980-12-23 External appearance test of semiconductor pellet

Country Status (1)

Country Link
JP (1) JPS57106848A (en)

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