JPS5586047A - Inverse magnetron discharge device - Google Patents
Inverse magnetron discharge deviceInfo
- Publication number
- JPS5586047A JPS5586047A JP16034778A JP16034778A JPS5586047A JP S5586047 A JPS5586047 A JP S5586047A JP 16034778 A JP16034778 A JP 16034778A JP 16034778 A JP16034778 A JP 16034778A JP S5586047 A JPS5586047 A JP S5586047A
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- supporting rod
- supporting
- anode
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE: To make inverse magnetron discharge persist in without being affected by the direction of a magnetic field by shaping the potential of discharge space into spherical symmetry.
CONSTITUTION: The anode 1 is spherical and is fixed to the supporting rod 1A. The one end of the supporting rod 1A is fixed to the end plate 14 which avoids parasitic discharge in the regions except for the desired one and the anode 1 is directly grounded through the supporting 1A and the end plate 14. The cathode 23 is formed by clamping two metallic round rods hollowed out in a semi-sphere except for the penetration sections 231 and 232 through which the supporting rod 1A penetrates, with the screw 233. The two rods which form the cathode 23 fix the supporting frame 7 made of electrical insulator between them. Negative high voltage is applied to the cathode 23 through the current measuring device 5 and the DC high voltage power supply 4.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16034778A JPS5586047A (en) | 1978-12-23 | 1978-12-23 | Inverse magnetron discharge device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16034778A JPS5586047A (en) | 1978-12-23 | 1978-12-23 | Inverse magnetron discharge device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5586047A true JPS5586047A (en) | 1980-06-28 |
Family
ID=15713011
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16034778A Pending JPS5586047A (en) | 1978-12-23 | 1978-12-23 | Inverse magnetron discharge device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5586047A (en) |
-
1978
- 1978-12-23 JP JP16034778A patent/JPS5586047A/en active Pending
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