JPS5585038A - Method of and device for transferring wafer - Google Patents
Method of and device for transferring waferInfo
- Publication number
- JPS5585038A JPS5585038A JP15742078A JP15742078A JPS5585038A JP S5585038 A JPS5585038 A JP S5585038A JP 15742078 A JP15742078 A JP 15742078A JP 15742078 A JP15742078 A JP 15742078A JP S5585038 A JPS5585038 A JP S5585038A
- Authority
- JP
- Japan
- Prior art keywords
- case
- vacant
- wafer
- wafers
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To eliminate an inconvenience of damaging a wafer due to shock and insertion of a plurality of wafers into one bridge at its transferring time by transferring the wafer to a vacant case without rotation using a rotation preventive plate.
CONSTITUTION: A case carrying fully wafers 3 is set at the full case inserting case 4 of a transfer unit, and a vacant case to insert the wafers 3 newly is inserted into a vacant case inserting case 5. Then, a rotation preventive plate 7 is raised by a lever 6, rotated at 180° around a supporting shaft 9 as a fulcrum toward the full case side by a vacant case handle lever 8, coated with a vacant case through the plate 7, and clamped by a hook 10. After it is inverted upside down by a full case side handle lever 11, the plate 7 is lowered by the lever 6 to thereby transfer the wafer 3. Finally, the case 4 is inverted at 180° to the original position.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15742078A JPS5585038A (en) | 1978-12-22 | 1978-12-22 | Method of and device for transferring wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15742078A JPS5585038A (en) | 1978-12-22 | 1978-12-22 | Method of and device for transferring wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5585038A true JPS5585038A (en) | 1980-06-26 |
Family
ID=15649233
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15742078A Pending JPS5585038A (en) | 1978-12-22 | 1978-12-22 | Method of and device for transferring wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5585038A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0047132A2 (en) * | 1980-09-02 | 1982-03-10 | Heraeus Quarzschmelze Gmbh | Method of and apparatus for transferring semiconductor wafers between carrier members |
US4944542A (en) * | 1987-10-07 | 1990-07-31 | Tel Yamanashi Limited | Support device |
-
1978
- 1978-12-22 JP JP15742078A patent/JPS5585038A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0047132A2 (en) * | 1980-09-02 | 1982-03-10 | Heraeus Quarzschmelze Gmbh | Method of and apparatus for transferring semiconductor wafers between carrier members |
US4431361A (en) * | 1980-09-02 | 1984-02-14 | Heraeus Quarzschmelze Gmbh | Methods of and apparatus for transferring articles between carrier members |
US4944542A (en) * | 1987-10-07 | 1990-07-31 | Tel Yamanashi Limited | Support device |
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