JPS5585038A - Method of and device for transferring wafer - Google Patents

Method of and device for transferring wafer

Info

Publication number
JPS5585038A
JPS5585038A JP15742078A JP15742078A JPS5585038A JP S5585038 A JPS5585038 A JP S5585038A JP 15742078 A JP15742078 A JP 15742078A JP 15742078 A JP15742078 A JP 15742078A JP S5585038 A JPS5585038 A JP S5585038A
Authority
JP
Japan
Prior art keywords
case
vacant
wafer
wafers
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15742078A
Other languages
Japanese (ja)
Inventor
Satoru Katagiri
Kazuhiko Miyazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi High Tech Corp
Original Assignee
Hitachi Ltd
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Ltd
Priority to JP15742078A priority Critical patent/JPS5585038A/en
Publication of JPS5585038A publication Critical patent/JPS5585038A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To eliminate an inconvenience of damaging a wafer due to shock and insertion of a plurality of wafers into one bridge at its transferring time by transferring the wafer to a vacant case without rotation using a rotation preventive plate.
CONSTITUTION: A case carrying fully wafers 3 is set at the full case inserting case 4 of a transfer unit, and a vacant case to insert the wafers 3 newly is inserted into a vacant case inserting case 5. Then, a rotation preventive plate 7 is raised by a lever 6, rotated at 180° around a supporting shaft 9 as a fulcrum toward the full case side by a vacant case handle lever 8, coated with a vacant case through the plate 7, and clamped by a hook 10. After it is inverted upside down by a full case side handle lever 11, the plate 7 is lowered by the lever 6 to thereby transfer the wafer 3. Finally, the case 4 is inverted at 180° to the original position.
COPYRIGHT: (C)1980,JPO&Japio
JP15742078A 1978-12-22 1978-12-22 Method of and device for transferring wafer Pending JPS5585038A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15742078A JPS5585038A (en) 1978-12-22 1978-12-22 Method of and device for transferring wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15742078A JPS5585038A (en) 1978-12-22 1978-12-22 Method of and device for transferring wafer

Publications (1)

Publication Number Publication Date
JPS5585038A true JPS5585038A (en) 1980-06-26

Family

ID=15649233

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15742078A Pending JPS5585038A (en) 1978-12-22 1978-12-22 Method of and device for transferring wafer

Country Status (1)

Country Link
JP (1) JPS5585038A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0047132A2 (en) * 1980-09-02 1982-03-10 Heraeus Quarzschmelze Gmbh Method of and apparatus for transferring semiconductor wafers between carrier members
US4944542A (en) * 1987-10-07 1990-07-31 Tel Yamanashi Limited Support device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0047132A2 (en) * 1980-09-02 1982-03-10 Heraeus Quarzschmelze Gmbh Method of and apparatus for transferring semiconductor wafers between carrier members
US4431361A (en) * 1980-09-02 1984-02-14 Heraeus Quarzschmelze Gmbh Methods of and apparatus for transferring articles between carrier members
US4944542A (en) * 1987-10-07 1990-07-31 Tel Yamanashi Limited Support device

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