JPS558031A - Semi-conductor device - Google Patents
Semi-conductor deviceInfo
- Publication number
- JPS558031A JPS558031A JP8011378A JP8011378A JPS558031A JP S558031 A JPS558031 A JP S558031A JP 8011378 A JP8011378 A JP 8011378A JP 8011378 A JP8011378 A JP 8011378A JP S558031 A JPS558031 A JP S558031A
- Authority
- JP
- Japan
- Prior art keywords
- film
- wiring
- layer
- metal
- plated metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To prevent line breakage at a connection window section by providing No. 1 metal-silicon compound layer between a semi-conductor base plate and a plated metal and also by providing No. 2 metal-silicon compound layer between the plated metal film and wiring.
CONSTITUTION: A dispersion layer 2 is provided on an Si base plate and a connection window of the layer 2 is provided on an SiO2 film 3 and an Si3N4 film 4. A Pt-Si film 5 and a Cu film 6 are embedded in the window, and an Al-Si wiring 7 and an Si wiring 8 and an Al wiring 9 are piled thereon. These wirings are separated by an SiO2 film 10 and a porous Al2O3 film formed by anodizing process. Further, the Al wiring 9 is covered with a non-porous Al2O3 film 12. In this mechanism, the plated metal film can be completely embedded in level even if there were remarkable difference in elevation of insulation films at the connection window section or scratches on the piled layers of insulation films, and therefore, it is possible to prevent the Al layer 9 from line breakage.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8011378A JPS558031A (en) | 1978-06-30 | 1978-06-30 | Semi-conductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8011378A JPS558031A (en) | 1978-06-30 | 1978-06-30 | Semi-conductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS558031A true JPS558031A (en) | 1980-01-21 |
Family
ID=13709122
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8011378A Pending JPS558031A (en) | 1978-06-30 | 1978-06-30 | Semi-conductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS558031A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02341A (en) * | 1987-02-02 | 1990-01-05 | Seiko Epson Corp | Semiconductor device |
-
1978
- 1978-06-30 JP JP8011378A patent/JPS558031A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02341A (en) * | 1987-02-02 | 1990-01-05 | Seiko Epson Corp | Semiconductor device |
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