JPS556784A - Method and device for astrigmatism correction in scanning electron microscope - Google Patents

Method and device for astrigmatism correction in scanning electron microscope

Info

Publication number
JPS556784A
JPS556784A JP3644579A JP3644579A JPS556784A JP S556784 A JPS556784 A JP S556784A JP 3644579 A JP3644579 A JP 3644579A JP 3644579 A JP3644579 A JP 3644579A JP S556784 A JPS556784 A JP S556784A
Authority
JP
Japan
Prior art keywords
astigmatism
blur circle
corrected
operated
astrigmatism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3644579A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6151377B2 (enrdf_load_stackoverflow
Inventor
Takashi Namae
Teruo Someya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP3644579A priority Critical patent/JPS556784A/ja
Publication of JPS556784A publication Critical patent/JPS556784A/ja
Publication of JPS6151377B2 publication Critical patent/JPS6151377B2/ja
Granted legal-status Critical Current

Links

JP3644579A 1979-03-28 1979-03-28 Method and device for astrigmatism correction in scanning electron microscope Granted JPS556784A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3644579A JPS556784A (en) 1979-03-28 1979-03-28 Method and device for astrigmatism correction in scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3644579A JPS556784A (en) 1979-03-28 1979-03-28 Method and device for astrigmatism correction in scanning electron microscope

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP15779077A Division JPS5492050A (en) 1977-12-29 1977-12-29 Method and apparatus for astigmatic correction of scanning electronic microscope and others

Publications (2)

Publication Number Publication Date
JPS556784A true JPS556784A (en) 1980-01-18
JPS6151377B2 JPS6151377B2 (enrdf_load_stackoverflow) 1986-11-08

Family

ID=12470000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3644579A Granted JPS556784A (en) 1979-03-28 1979-03-28 Method and device for astrigmatism correction in scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS556784A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5766637A (en) * 1980-10-14 1982-04-22 Toshiba Corp Exposure device for electron beam
JPS58207561A (ja) * 1982-05-27 1983-12-03 Honda Motor Co Ltd 自動変速プ−リ

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2006104193A1 (ja) * 2005-03-29 2008-09-11 パイオニア株式会社 非点収差の調整方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834477A (enrdf_load_stackoverflow) * 1971-09-06 1973-05-18
JPS50141261A (enrdf_load_stackoverflow) * 1974-04-24 1975-11-13
JPS5218161A (en) * 1975-08-01 1977-02-10 Hitachi Ltd Sample scan type sample image display unit

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834477A (enrdf_load_stackoverflow) * 1971-09-06 1973-05-18
JPS50141261A (enrdf_load_stackoverflow) * 1974-04-24 1975-11-13
JPS5218161A (en) * 1975-08-01 1977-02-10 Hitachi Ltd Sample scan type sample image display unit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5766637A (en) * 1980-10-14 1982-04-22 Toshiba Corp Exposure device for electron beam
JPS58207561A (ja) * 1982-05-27 1983-12-03 Honda Motor Co Ltd 自動変速プ−リ

Also Published As

Publication number Publication date
JPS6151377B2 (enrdf_load_stackoverflow) 1986-11-08

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