JPS5567725A - Forming method of electrode for display - Google Patents
Forming method of electrode for displayInfo
- Publication number
- JPS5567725A JPS5567725A JP14071978A JP14071978A JPS5567725A JP S5567725 A JPS5567725 A JP S5567725A JP 14071978 A JP14071978 A JP 14071978A JP 14071978 A JP14071978 A JP 14071978A JP S5567725 A JPS5567725 A JP S5567725A
- Authority
- JP
- Japan
- Prior art keywords
- dry film
- substrate
- electrodes
- display device
- low temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
PURPOSE: To achieve the reduction in process, reduce orientation defect and make possible fine patterning by laminating a dry film on a substrate then forming patterns and forming electrodes through low temperature sputtering.
CONSTITUTION: For example, in the formation of the transparent electrodes of a liquid crystal display device, a dry film 2 is laminated on a glass substrate 1 and after it is masked, it is subjected to exposure and developing, whereby patterns are formed. This is set in a low temperature sputter device and transparent electrode material such as InO3, SnO3 or the like is sputtered to thicknesses of 200W400Å at the surface temperature 50°C or less of the substrate 1, thence the dry film is peeled, whereby pattern electrodes 3 are formed. In this way, considerable rationalization may be achieved and yet the display device of the quality equivalent to that by conventional methods may be obtained.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14071978A JPS5567725A (en) | 1978-11-14 | 1978-11-14 | Forming method of electrode for display |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14071978A JPS5567725A (en) | 1978-11-14 | 1978-11-14 | Forming method of electrode for display |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5567725A true JPS5567725A (en) | 1980-05-22 |
Family
ID=15275109
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14071978A Pending JPS5567725A (en) | 1978-11-14 | 1978-11-14 | Forming method of electrode for display |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5567725A (en) |
-
1978
- 1978-11-14 JP JP14071978A patent/JPS5567725A/en active Pending
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