JPS5562761A - Semiconductor integrated circuit device - Google Patents
Semiconductor integrated circuit deviceInfo
- Publication number
- JPS5562761A JPS5562761A JP13475878A JP13475878A JPS5562761A JP S5562761 A JPS5562761 A JP S5562761A JP 13475878 A JP13475878 A JP 13475878A JP 13475878 A JP13475878 A JP 13475878A JP S5562761 A JPS5562761 A JP S5562761A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- transistor
- emitter
- base
- bipolar transistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 239000012535 impurity Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0214—Particular design considerations for integrated circuits for internal polarisation, e.g. I2L
- H01L27/0229—Particular design considerations for integrated circuits for internal polarisation, e.g. I2L of bipolar structures
- H01L27/0233—Integrated injection logic structures [I2L]
- H01L27/0244—I2L structures integrated in combination with analog structures
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Bipolar Integrated Circuits (AREA)
- Logic Circuits (AREA)
Abstract
PURPOSE:To improve the characteristics of a semiconductor integrated circuit device by separately forming the emitter first inpurity layer for an imverter transistor and the collector second impurity layer for a bipolar transistor, approaching the first layer to a base layer and separating the second layer from the base layer. CONSTITUTION:An N<+>-type layer 8 is provided on a P-type semiconductor substrate 6, an N<+>-type layer 7 is formed stepwisely on an eoitaxial layer 10 to thereby form an epitaxial layer 11. The layer 7 is so formed as not to reach the base layer 4 of a bipolar transistor. Then, according to the conventional process, the emitter 1 of an injector transistor, the common base of an inverter transistor, collectors 3 thereof, and base 4 and emitter 4' of a bipolar transistor are formed, and channel stopper 12 and isolating layers 13, 14 are formed as required. According to this configuration, it can improve the emitter implanting efficiency of the inverter transistor of I<2>L and thereby improve the dielectric strength of the coexistent bipolar transistor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13475878A JPS5562761A (en) | 1978-11-01 | 1978-11-01 | Semiconductor integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13475878A JPS5562761A (en) | 1978-11-01 | 1978-11-01 | Semiconductor integrated circuit device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5562761A true JPS5562761A (en) | 1980-05-12 |
Family
ID=15135863
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13475878A Pending JPS5562761A (en) | 1978-11-01 | 1978-11-01 | Semiconductor integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5562761A (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5161786A (en) * | 1974-11-27 | 1976-05-28 | Hitachi Ltd | |
JPS5263080A (en) * | 1975-11-18 | 1977-05-25 | Matsushita Electric Ind Co Ltd | Production of semiconductor integrated circuit device |
JPS52154383A (en) * | 1976-06-18 | 1977-12-22 | Hitachi Ltd | Semiconductor integrated circuit device |
JPS533781A (en) * | 1976-06-30 | 1978-01-13 | Mitsubishi Electric Corp | Semiconductor integrated circuit |
JPS5354983A (en) * | 1976-10-28 | 1978-05-18 | Nec Corp | Semiconductor ingegrated circuit |
-
1978
- 1978-11-01 JP JP13475878A patent/JPS5562761A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5161786A (en) * | 1974-11-27 | 1976-05-28 | Hitachi Ltd | |
JPS5263080A (en) * | 1975-11-18 | 1977-05-25 | Matsushita Electric Ind Co Ltd | Production of semiconductor integrated circuit device |
JPS52154383A (en) * | 1976-06-18 | 1977-12-22 | Hitachi Ltd | Semiconductor integrated circuit device |
JPS533781A (en) * | 1976-06-30 | 1978-01-13 | Mitsubishi Electric Corp | Semiconductor integrated circuit |
JPS5354983A (en) * | 1976-10-28 | 1978-05-18 | Nec Corp | Semiconductor ingegrated circuit |
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