JPS5560869A - Device for measuring spreading resistance - Google Patents

Device for measuring spreading resistance

Info

Publication number
JPS5560869A
JPS5560869A JP13597178A JP13597178A JPS5560869A JP S5560869 A JPS5560869 A JP S5560869A JP 13597178 A JP13597178 A JP 13597178A JP 13597178 A JP13597178 A JP 13597178A JP S5560869 A JPS5560869 A JP S5560869A
Authority
JP
Japan
Prior art keywords
probes
spreading resistance
thermoelectromotive force
probe
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13597178A
Other languages
English (en)
Japanese (ja)
Other versions
JPS627983B2 (enrdf_load_stackoverflow
Inventor
Katsuhiro Tsukamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP13597178A priority Critical patent/JPS5560869A/ja
Publication of JPS5560869A publication Critical patent/JPS5560869A/ja
Publication of JPS627983B2 publication Critical patent/JPS627983B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Resistance Or Impedance (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP13597178A 1978-10-31 1978-10-31 Device for measuring spreading resistance Granted JPS5560869A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13597178A JPS5560869A (en) 1978-10-31 1978-10-31 Device for measuring spreading resistance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13597178A JPS5560869A (en) 1978-10-31 1978-10-31 Device for measuring spreading resistance

Publications (2)

Publication Number Publication Date
JPS5560869A true JPS5560869A (en) 1980-05-08
JPS627983B2 JPS627983B2 (enrdf_load_stackoverflow) 1987-02-20

Family

ID=15164135

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13597178A Granted JPS5560869A (en) 1978-10-31 1978-10-31 Device for measuring spreading resistance

Country Status (1)

Country Link
JP (1) JPS5560869A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6217130U (enrdf_load_stackoverflow) * 1985-07-16 1987-02-02
US5214389A (en) * 1992-01-06 1993-05-25 Motorola, Inc. Multi-dimensional high-resolution probe for semiconductor measurements including piezoelectric transducer arrangement for controlling probe position
US5369372A (en) * 1990-12-13 1994-11-29 Interuniversitair Micro Elektronica Centrum Vzw Method for resistance measurements on a semiconductor element with controlled probe pressure
US5585734A (en) * 1990-07-09 1996-12-17 Interuniversitair Micro Elektronica Centrum Vzw Method for determining the resistance and carrier profile of a semiconductor element using a scanning proximity microscope
US5723981A (en) * 1994-08-29 1998-03-03 Imec Vzw Method for measuring the electrical potential in a semiconductor element
CN105116229A (zh) * 2015-07-21 2015-12-02 中国船舶重工集团公司第七一二研究所 一种燃料电池电阻测量装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6217130U (enrdf_load_stackoverflow) * 1985-07-16 1987-02-02
US5585734A (en) * 1990-07-09 1996-12-17 Interuniversitair Micro Elektronica Centrum Vzw Method for determining the resistance and carrier profile of a semiconductor element using a scanning proximity microscope
US5369372A (en) * 1990-12-13 1994-11-29 Interuniversitair Micro Elektronica Centrum Vzw Method for resistance measurements on a semiconductor element with controlled probe pressure
US5214389A (en) * 1992-01-06 1993-05-25 Motorola, Inc. Multi-dimensional high-resolution probe for semiconductor measurements including piezoelectric transducer arrangement for controlling probe position
US5723981A (en) * 1994-08-29 1998-03-03 Imec Vzw Method for measuring the electrical potential in a semiconductor element
CN105116229A (zh) * 2015-07-21 2015-12-02 中国船舶重工集团公司第七一二研究所 一种燃料电池电阻测量装置
CN105116229B (zh) * 2015-07-21 2018-03-16 中国船舶重工集团公司第七一二研究所 一种燃料电池电阻测量装置

Also Published As

Publication number Publication date
JPS627983B2 (enrdf_load_stackoverflow) 1987-02-20

Similar Documents

Publication Publication Date Title
Henning et al. Transient response of an intrinsic thermocouple
EP0252697A3 (en) Semiconductor wafer temperature measuring device and method
JPS52137734A (en) High frequency induction heating device
JPS5560869A (en) Device for measuring spreading resistance
GB1535793A (en) Measuring probes
JPS53131081A (en) Thermometer
CN209446504U (zh) 一种可同时测量热电参数和霍尔系数的测量系统
US2642737A (en) Apparatus for investigating the water content of a gas
Accorsi et al. A new microsensor for environmental measurements
JPS5510517A (en) Defect detector by heating
FR2279095A1 (fr) Procede de mesure du coefficient de transfert de chaleur
SU114969A1 (ru) Устройство дл определени разности температуры и влажности в приземном слое воздуха психрометрическим способом
GB1433803A (en) Fouling measuing device
JPS5248384A (en) Surface temperature measuring portion
JPS62165325A (ja) ランプアニ−ル装置
JPS53107382A (en) Thermal conductivity measuring device of thin film form members
JPS55134346A (en) Method for measuring thermal property of matter by arbitrary heating
SU934336A1 (ru) Устройство дл измерени термо-эдс металлов и сплавов
JPS5544931A (en) Temperature characteristics tester
JPS556251A (en) Heat conductivity meter
JPS55158546A (en) Measuring method of caloric value and thermo physical value with internal heat generation
JPS5679258A (en) Detecting body for thermoelectric and air-temperature anemometer
WIRSIG An experimental method of testing thin-film heat transfer gages(M. S. Thesis)
Koestoer Zero method heat flux sensor
SU141938A1 (ru) Способ измерени термоэлектродвижущих сил полупроводниковых материалов