JPS5560096A - Crystal diameter controlling method with laser beam - Google Patents
Crystal diameter controlling method with laser beamInfo
- Publication number
- JPS5560096A JPS5560096A JP13105878A JP13105878A JPS5560096A JP S5560096 A JPS5560096 A JP S5560096A JP 13105878 A JP13105878 A JP 13105878A JP 13105878 A JP13105878 A JP 13105878A JP S5560096 A JPS5560096 A JP S5560096A
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- diameter
- laser beam
- mirror
- temp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To make the diameter of a single crystal constant by detecting the diameter of a growing single crystal with a laser beam and controlling it when the crystal is pulled from a melt with a seed crystal.
CONSTITUTION: Beam 15 emitted from laser beam source 8, i.e. laser beam 15 is contracted with beam expander 16 and divided into two parallel beams at an interval of a desired crystal diameter with half-mirror 10 and mirror 9. The beams are received by photoreceptors 11, 11, and the diameter of a single crystal is made constant by raising and dropping the temp. as the diameter becomes larger and smaller, respectively. Since this temp. control depends on crystal components, a program of (crystal fatting rate)-(temp. rise) is formed every crystal. In order to pass through beam 15, small openings are made in heat insulating tube 17 and after-heater 18. Mirror 9, half-mirror 10 and two photoreceptors 11 are parallelly movable so that a desired crystal diameter is obtd.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13105878A JPS5560096A (en) | 1978-10-26 | 1978-10-26 | Crystal diameter controlling method with laser beam |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13105878A JPS5560096A (en) | 1978-10-26 | 1978-10-26 | Crystal diameter controlling method with laser beam |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5560096A true JPS5560096A (en) | 1980-05-06 |
Family
ID=15049017
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13105878A Pending JPS5560096A (en) | 1978-10-26 | 1978-10-26 | Crystal diameter controlling method with laser beam |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5560096A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5954694A (en) * | 1982-09-24 | 1984-03-29 | Fujitsu Ltd | Method for growth of single crystal |
-
1978
- 1978-10-26 JP JP13105878A patent/JPS5560096A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5954694A (en) * | 1982-09-24 | 1984-03-29 | Fujitsu Ltd | Method for growth of single crystal |
JPH0420875B2 (en) * | 1982-09-24 | 1992-04-07 | Fujitsu Ltd |
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