JPS5373480A - Hot zone for sheet crystal making apparatus - Google Patents
Hot zone for sheet crystal making apparatusInfo
- Publication number
- JPS5373480A JPS5373480A JP14961776A JP14961776A JPS5373480A JP S5373480 A JPS5373480 A JP S5373480A JP 14961776 A JP14961776 A JP 14961776A JP 14961776 A JP14961776 A JP 14961776A JP S5373480 A JPS5373480 A JP S5373480A
- Authority
- JP
- Japan
- Prior art keywords
- hot zone
- making apparatus
- sheet crystal
- crystal making
- sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To make it possible to grow many stable large sheet crystals simultaneously by installing one or more pairs of reflecting board to hot zone section so as to control temp. distribution efficiently.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14961776A JPS5373480A (en) | 1976-12-13 | 1976-12-13 | Hot zone for sheet crystal making apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14961776A JPS5373480A (en) | 1976-12-13 | 1976-12-13 | Hot zone for sheet crystal making apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5373480A true JPS5373480A (en) | 1978-06-29 |
JPS5340593B2 JPS5340593B2 (en) | 1978-10-27 |
Family
ID=15479117
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14961776A Granted JPS5373480A (en) | 1976-12-13 | 1976-12-13 | Hot zone for sheet crystal making apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5373480A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102560630A (en) * | 2012-01-12 | 2012-07-11 | 徐州协鑫光电科技有限公司 | Thermal field capable of allowing synchronous growth of a plurality of crystals with edge-defined film-fed crystal growth technique and method thereof |
CN103160915A (en) * | 2011-12-09 | 2013-06-19 | 洛阳金诺机械工程有限公司 | Drawing die plate for C-shaped silicon core |
JP5923700B1 (en) * | 2015-11-30 | 2016-05-25 | 並木精密宝石株式会社 | Large EFG method growth furnace lid structure |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0230497A (en) * | 1988-07-16 | 1990-01-31 | Nagao Kogyo:Kk | Recovery device for chip in shear piercing |
JP7147213B2 (en) | 2018-03-23 | 2022-10-05 | Tdk株式会社 | Single crystal growth die by EFG method, single crystal growth method by EFG method and single crystal by EFG method |
-
1976
- 1976-12-13 JP JP14961776A patent/JPS5373480A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103160915A (en) * | 2011-12-09 | 2013-06-19 | 洛阳金诺机械工程有限公司 | Drawing die plate for C-shaped silicon core |
CN102560630A (en) * | 2012-01-12 | 2012-07-11 | 徐州协鑫光电科技有限公司 | Thermal field capable of allowing synchronous growth of a plurality of crystals with edge-defined film-fed crystal growth technique and method thereof |
JP5923700B1 (en) * | 2015-11-30 | 2016-05-25 | 並木精密宝石株式会社 | Large EFG method growth furnace lid structure |
Also Published As
Publication number | Publication date |
---|---|
JPS5340593B2 (en) | 1978-10-27 |
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